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Semiconductor Process and Manufacturing Technologies for ...
Semiconductor Process and Manufacturing Technologies for 90-nm Process Generation 90 Semiconductor Process and Manufacturing Technologiesfor 90-nm Process GenerationOVERVIEW: Hitachi is actively working on the miniaturization andstandardization of CMOS (complementary metal-oxide Semiconductor )devices and on the establishment of a CMOS platform. This will enableHitachi to share IP (intellectual property), a design asset. Furthermore, inconjunction with this platform, Hitachi will develop core devices other thanCMOS devices and combine rich IP to provide customers with system-on-a-chip products as an optimal solution. Hitachi is adopting an APC(advanced Process control) technology to reduce variation in its processand Manufacturing Technologies . It also aims to support the production of asmall volume of many products and to respond quickly to market andcustomer needs, especially through the full single-wafer processing line for300-mm wafers at Trecenti Technologies , Inc.
Semiconductor Process and Manufacturing Technologies for 90-nm Process Generation 92 with gate dimensions under 50 nm and an insulation film thinner than 1.0 nm.
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