Transcription of Settling of Colloidal Silica Particles in CMP Slurry ...
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Settling of Colloidal Silica Particles in CMP Slurry ...
Settling of Colloidal Silica Particles in CMP Slurry : monitoring , effect , and HandlingJie Lin and W. Scott RaderFujimi Corporation R&D, USAWhy a concern for particle Settling in Slurry ?2 Settling of particlesChanges in Physical properties Particle concentration Chemical concentrationsEffect onPolishing performance ( removal rate)Three slurries have different effects from particle settlingSlurryParticlesize (d50) Silica (wt%)Surfactant(wt%)pHViscosi ty(cP)CMPapplicationSlurry A~ 67 nm~ 6% B~ 100 nm~ 7%~ 1 % C~ 65 nm~ 5%< % of particle settlingSlurry A after Settling for 10 yearsSize (nm) mmV (cm/yr) Density: particle , Slurry .
Settling of Colloidal Silica Particles in CMP Slurry: Monitoring, Effect, and Handling Jie Lin and W. Scott Rader Fujimi Corporation R&D, USA
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