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電子デバイス工学 - Tatsuru Shirafuji

(2) MOS FET (2-2) MOS ( ) (2-3) MOS MIS q Mq Sq MIS M= S vs. MIS M S VFB VG=0 VG=VFB FBTITVVV+= S MIS MIS (Fixed charge) (Mobile ionic charge) (Oxide trapped charge) SiO2 SiO2 X SiO2 Na K S. M. Sze and Kwok K. Ng: Physics of Semiconductor Devices 3rd Ed. (Wiley Interscience, 2007, New Jersey) MOScapacitanceGatevoltage0 PositiveNegative VTIdeal MOS VT OXIFCIFCCQV = CV VG QIFC NOFC(z) = OX0 OXOFCOXOFCd)(CdzdzzNqVIFC: Interface Fixed Charge OFC: Oxide Fixed Charge MOScapacitanceGatevoltage0 PositiveNega

10 . 電界効果トランジスタ (2) mos fet (2-2) mosキャパシタ(理想からのずれ) (2-3) トランジスタ動作 . 電子デバイス工学

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