Transcription of The Basics of Air Ionization for High-Technology ...
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The Basics of Air Ionization for High-Technology ...
AIRIONIZATIONC ontrolling static charge is essential for maximizingyield, quality, and profit in High-Technology control enhances semiconductor production andhas become a necessity in the manufacture of hard disk drivesand flat-panel displays (FPDs).Failure to control static chargeleads to product losses from static-attracted particle contam-ination and from electrostatic discharge (ESD).Control programs to assist in mitigating static-charge prob-lems are available from several sources, among them the ESDA ssociation and Semiconductor Equipment and ,2 The primary method employed for dealingwith both conductive and static-dissipative objects including people is direct connection to ground to dissipatethe static products and work areas both may contain materialsthat are insulators.
AIR IONIZATION C ontrolling static charge is essential for maximizing yield,quality,and profit in high-technology industry. Such control enhances semiconductor production and
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