Transcription of Ultrahigh-Purity Valves for Atomic Layer Processing, ALD ...
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Ultrahigh-Purity Valves for Atomic Layer Processing, ALD ...
Atomic Layer Deposition (ALD) Valves 1 Atomic Layer DEPOSITIONA tomic Layer Deposition (ALD) Valves Ultrahigh cycle life with high-speed actuation Cv range from to Full immersion capability up to 392 F (200 C) with thermal actuators Electronic or optical actuator position-sensing option Suitable for Ultrahigh-Purity applications with 316L VIM-VAR stainless steel body Modular surface-mount, tube butt weld, and VCR end connectionsUltrahigh-Purity Valvesfor Atomic Layer Bellows- and diaphragm -Sealed ValvesATOMIC L AYER DEPOSITIONC ontentsALD3 and ALD6 diaphragm ValvesFeatures.
Springs S17700 Button 316 SS/A479 Bushing Carbon-filled PTFE 2 Thermal isolation coupling housing (thermal model only) 316 SS/A479 3 Thermal isolation coupling stem (thermal model only) S17400 4 Bonnet nut 316 SS/A479 5 Bonnet S17400 6 Diaphragm Cobalt-based superalloy (UNS R30003)/AMS 5876 7 Seat High-purity PFA Type II/D3307
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