Transcription of Ultrahigh-Purity Valves for Atomic Layer Processing, ALD ...
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Ultrahigh-Purity Valves for Atomic Layer Processing, ALD ...
Atomic Layer Deposition (ALD) Valves 1 Atomic Layer DEPOSITIONA tomic Layer Deposition (ALD) Valves Ultrahigh cycle life with high-speed actuation Cv range from to Full immersion capability up to 392 F (200 C) with thermal actuators Electronic or optical actuator position-sensing option Suitable for Ultrahigh-Purity applications with 316L VIM-VAR stainless steel body Modular surface-mount, tube butt weld, and VCR end connectionsUltrahigh-Purity Valvesfor Atomic Layer bellows - and Diaphragm-Sealed ValvesATOMIC L AYER DEPOSITIONC ontentsALD3 and ALD6 Diaphragm ValvesFeatures.
4 Bellows- and Diaphragm-Sealed Valves ATOMIC LAER DEPOSITION Ordering Information and Dimensions (ALD3 and ALD6) Dimensions, in inches (millimeters), are for reference only and are subject to change . 1 .061 (26 .9) 1 .06 (26 .9) Four mounting holes, M5 × 0 .8-6H thread, 0 .25 (6 .4) deep, located 45° from center line,
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