Transcription of Ultrahigh-Purity Valves for Atomic Layer Processing, ALD ...
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Ultrahigh-Purity Valves for Atomic Layer Processing, ALD ...
Atomic Layer Deposition (ALD) Valves 1 Atomic Layer DEPOSITIONA tomic Layer Deposition (ALD) Valves Ultrahigh cycle life with high-speed actuation Cv range from to Full immersion capability up to 392 F (200 C) with thermal actuators Electronic or optical actuator position-sensing option Suitable for Ultrahigh-Purity applications with 316L VIM-VAR stainless steel body Modular surface-mount, tube butt weld, and VCR end connectionsUltrahigh-Purity Valvesfor Atomic Layer Bellows- and Diaphragm-Sealed ValvesATOMIC L AYER DEPOSITIONC ontentsALD3 and ALD6 Diaphragm ValvesFeatures.
Female VCR Fitting End Connections.49 Air inlet (37 .8) 1/8-27 NPT.44.2) B A Normally Closed Standard Actuator Butt Weld End Connections End Connections Standard Actuator Ordering Number Thermal Actuator Ordering Number Dimensions, in . (mm) A B Normally Closed Normally Inlet/Outlet Size Open ALD3 Series Female VCR fitting 1/4 in .
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