Transcription of US Cleanroom Standards - Compliancewire
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US Cleanroom Standards - Compliancewire
ISO 5 ISO 6 ISO 7 ISO 8 ISO 9 ISO 14644-1 maximum particles/m3 FED STD 209 Eequivalent* m 5 m3,52029 Class 10035,200293 Class 1,000352,0002,930 Class 10,0003,520,00029,300 Class 100,00035,200,000293,000 Room airClassmaximum particles/m3At RestAt RestIn OperationIn m5 m5 mGrade A3,500203,50020 Grade B3,50029350,00022,900 Grade C350,0002,0003,500,00020,000 Grade D3,520,00029,000n/an/aISO 5 ISO 7 ISO 9US Cleanroom StandardsEU Cleanroom Standards *This classification was phased out in 2001 and is included for reference only.
ISO 5 ISO 6 ISO 7 ISO 8 ISO 9 ISO 14644-1 maximum particles/m3 FED STD 209E equivalent* ≥0.5 µm ≥5 µm 3,520 29 Class 100 35,200 293 Class 1,000
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