Vacuum Level, Crucible Temperature, Crucible Type ...

For detailed information on evaporation and deposition systems, please visit: Wall sized posters, 2x3 ft, and laminated letter size versions of this chart are also available. H. Thermal evaporation p Guide for the Elements* He Cracker, ECR. or RF Plasma Vacuum Level, Crucible Temperature, Crucible Type, Effusion Cell Type, E-beam & Plasma Choices Li (mp 180) Be (mp 1287) Element to be Vaporized Cu (mp 1085 C) mp = melting point in degrees Celsius B (mp 2075) C (mp 3550) N O F Ne Single Filament Recommended Effusion Cell or Single Filament or High Low Temp High Temp Carbon Effusion RF Plasma ECR Plasma or High Temp Evaporator System Temp Al2O3, PBN, VC, VC (BeO) Recommended Crucibles Al2O3, Mo, Mo Ta, Ta (BeO) BeO crucibles require care C, C VC PGR PBN Al2O3. (BeO). 10-8 235 10-8 707 vapor pressure 10-8 torr 722 C temperature of Crucible 10-8 1282 10-8 1657. -6. 10-6 306 10-6 832 vapor pressure 10 torr 852 C temperature of Crucible 10-6 1467 10-6 1867. 10-4 404 10-4 997 vapor pressure 10-4 torr 1027 C temperature of Crucible 10-4 1707 10-4 2136.

For detailed information on evaporation and deposition systems, please visit: www.oxford-vacuum.com Wall sized posters, 2x3 ft, and laminated letter size versions of this chart are also available.

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