Transcription of Versa 3D DualBeam - FEI
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Versa 3D DualBeam - FEI
Versa 3D DualBeam Versatility for demanding 3D characterization, prototyping and in situ research needs Building on the history and success The ultra-large chamber allows addition of a variety of accessories and detectors to support a broad range of of FEI's pioneering DualBeam , imaging and analytical techniques, accessing information from every angle. high-resolution, low vacuum and With Versa 3D the choice is yours to optimize the system ESEM expertise, FEI introduces the for conductive samples in high vacuum ; non-conductive samples with low vacuum ; or expand the horizons of research to most versatile DualBeam instrument dynamic applications. to date. The Versa 3D offers KEY BENEFITS. state-of-the-art imaging and DualBeam functionality to examine surface and sub-surface areas analytical performance to deliver a of any sample (sample modification at the nm and m scale).
Vacuum system · 1 x 240 l/s TMP · 1 x PVP oil-free (scroll-pump) · 2 x IGP (for electron column) · 1 x IGP (for ion column) Chamber · E- and I-beam coincidence point
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