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Wafer Loader - techsansystem.co.kr
AL110-8 Dimensions(unit : mm)AL110-6 Dimensions(unit : mm)( ) Combined with MX51 Wafer LoaderSuper clean and fast Wafer transferSpecifications are subject to change without any obligation on the part of the versions200/150mm compatible versions100/125/150mm compatible versionsItemLLMLBMB LMBLLMLBMB LMBLLMLMBW afer diameters*1200mm orientation flat type, 200mm notch type__150mm orientation flat type_100mm, 125mm and 150mm orientation flat type_CassetteFluoroware, H-ber type_Number of cassetteOne_Inspection modesSequential and sampling_Transfer modesMicro inspection_____Top macro inspection___ _ ____Back macro inspection____ ___2nd back surface macro inspection____ ___Orientation flat/notchOne every 90 , alignment also available before _alignment unloading wafers into cassetteNo-contact centering_Wafer transferRobot arms with vacuum pickup_Adaptable microscope*2MX61_MX51_Dimensions (mm)580 (W) x580 (D) x297 (H)490 (W) x520 (D) x297 (H)Weight (kg)30323131333032313133262830 UtilitiesPower source:AC100 to 120V or AC220 to 240V 50/60Hz,Vacuum pressure: -67kPa to -80kPaSpecificationsModel*1 Applicable for SEMI and JEIDA 6- a
AL110-8 Dimensions (unit : mm) AL110-6 Dimensions (unit : mm) ( ) Combined with MX51 Wafer Loader Super clean and fast wafer transfer Specifications are subject to change without any obligation on the part of the manufacturer.
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