Transcription of Wafer Loader - techsansystem.co.kr
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Wafer Loader - techsansystem.co.kr
AL110-8 dimensions (unit : mm)AL110-6 dimensions (unit : mm)( ) Combined with MX51 Wafer LoaderSuper clean and fast Wafer transferSpecifications are subject to change without any obligation on the part of the versions200/150mm compatible versions100/125/150mm compatible versionsItemLLMLBMB LMBLLMLBMB LMBLLMLMBW afer diameters*1200mm orientation flat type, 200mm notch type__150mm orientation flat type_100mm, 125mm and 150mm orientation flat type_CassetteFluoroware, H-ber type_Number of cassetteOne_Inspection modesSequential and sampling_Transfer modesMicro inspection_____Top macro inspection___ _ ____Back macro inspection____ ___2nd back surface macro inspection____ ___Orientation flat/notchOne every 90.
AL110-8 Dimensions (unit : mm) AL110-6 Dimensions (unit : mm) ( ) Combined with MX51 Wafer Loader Super clean and fast wafer transfer Specifications are subject to change without any obligation on the part of the manufacturer.
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