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X-ray thin-film measurement techniques

1. IntroductionThis is the fifth article in the series of X-ray thin-filmmeasurement techniques . The second, third and fortharticles of this series, previously published in the RigakuJournal, describe out-of-plane, high-resolution and in-plane XRD measurements to obtain crystallographicinformation on crystal size, lattice strain and orientationrelationship of a thin-film material. These measurementshave been based on the premise of a crystalline thin the other hand, the X-ray reflectivity (XRR) measurement is not a technique to evaluate diffractionphenomenon. The XRR measurement techniquedescribed in this article is used to analyze X-rayreflection intensity curves from grazing incident X-raybeam to determine thin-film parameters includingthickness, density, and surface or interface article will provide an overview of the principles ofX-ray reflectivity, measurement procedures, and analysismethods.

The X-ray optics for an X-ray beam onto a flat surface of material at grazing angles has been described in the previous section. In this section, the analysis of the resulting X-ray reflectivity curve to obtain information on the structural parameters of a …

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