Yield Analysis and Optimization - USI – Informatics

Figure 1: An SEM (Scanning Electron Microscope) picture showing a bridging fault on Metal 3. Note the row of vias on each metal line. ... a very brief introduction is essential to understand flnal yield measurement at the foundry. ... their disposal. For example, with focused ion beam (FIB), existing circuit lines can be cut

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  Analysis, Introduction, Focused, Yield, Beam, Electron, Optimization, Scanning, Microscope, Scanning electron microscope, Yield analysis and optimization, Focused ion beam

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