Example: bachelor of science
Bounded Variation
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MEMS Fabrication I : Process Flows and Bulk Micromachining
www-bsac.eecs.berkeley.edu• Etch rate variation due to wet etch set-up • Loss of reactive species through consumption • Evaporation of liquids • Poor mixing (etch product blocks diffusion of reactants) • Contamination • Applied potential • Illumination • Etch rate variation due to material being etched • Impurities/dopants • Etch rate variation due ...