Series Photoresists
Found 3 free book(s)
Liquid Filtration Solutions - Entegris
www.entegris.comImpact filters are optimized for various photoresists and solvents including ArF, KrF, BARC, top coat and pre-thinner, that ... offer Torrento X series traditional radial filters to meet the most critical demands of aggressive acid, base, and cleaning applications.
Spin-coating of Photoresists - MicroChemicals
microchemicals.com4500, ®AZ® 9200 or AZ ECI 3000 series, the last two digits of the designation (e.g. AZ® 1518) indicate the fi lm thickness attained by spin coating at 4000 rpm (for some resists at 3000 rpm) in 100 nm units using the example of ®AZ 1518, i.e. 1.8 μm. Infl uence of the Spin Time If the spin-coating is stopped during the phase in
Photolithography - University of Washington
labs.ece.uw.eduAZ-1500 Series Photoresist Thickness Versus Spin Speed Note that choosing the proper photoresist viscosity is the primary means to control the applied thickness. The spin speed only adds fine adjustment within this range. Graph from AZ Electronic Materials data sheet