198/192 Series 200 mm Wafer Transport Carriers
198 /192 SERIES 200 MM WAFER TRANSPORT CARRIERS Overview Trends in wafer processing technology have mandated advancements in wafer carrier tech
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Installation and use manual - Entegris WaferCare
www.wafercare.com200 MM WAFER CARRIER INTERFACE ENTEGRIS, INC. INSTALLATION AND USE MANUAL 3 Definitions Bar end See “H” bar. Crossbar The mass of material connecting the two sides of the carrier at the bar end of the carrier. End wall The wall of the carrier opposite the “H” bar end of the carrier. Flange Mass of material on the exterior of a carrier, perpendicular to the side walls.
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