AXIC APPLICATION REPORT

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AXIC APPLICATION REPORT NO. 10 2 TABLE 1 c omparason o f wet an dd try resast stnppanJ!. Disadvantages of wet resist stripping Advantages of dry (or plasma) stripping • handling and disposal of large volumes of either • using a gas medium -usually oxygen hydrocarbon solvents or strongly oxidizing acids • non-toxic, non-corrosive • safety and technical requirements to handle toxic and ...

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