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Chapter 23: Wafer Level Packaging

Chapter 23: Wafer Level Packaging

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last” processes were used to make top-side die connections to the pads normally located on the die underside. This process has been used by the MEMS industry to mount a logic or analog die on top of a MEMS die, or vice versa, as shown in figure 4. This became another level of WLP heterogeneous integration complexity.

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