MEMS: Microelectromechanical Systems
Types of MEMS Packages ! Ceramic Packaging " Hermetic when sealed " High Young’s Modulus " Flip Chip or Wirebonding ! Plastic Packaging " Not ... " Magnetic Actuators " Comb-drives . 6 Accelerometers ! Applications: " Air bag crash sensors " Active suspension systems " Antilock brake systems " Ride ...
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