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Expose SU-8 is optimized for near UV (350-400nm) exposure. i-line exposure tools are recommended. SU-8 is virtually transparent and insensitive above 400nm but has high ac-
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SU-8 Permanent Photoresists - MicroChem
www.microchem.comSU-8 Permanent Photoresists Resist Description Property SU-8 2000 SU-8 3000 Tone Negative Negative Max Single Coat Thickness, µm 250 100 Aspect Ratio 10:1 5:1
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SU-8 3000 Data Sheet ver 4.2
microchem.comSU-8 3000 Permanent Epoxy Negative Photoresist SU-8 3000is a high contrast, epoxy based photoresist designed for micromachining and other microelectronic applications, where a thick, chemically and thermally stable image is desired.