PHOTOLITHOGRAPHY OVERVIEW FOR MICROSYSTEMS
Jul 10, 2012 · 10 Alignment v "Align" is one of the most critical steps in the entire microsystems fabrication process. v A misalignment of one micron or smaller can destroy the device and all the devices on the wafer. v Each layer must be aligned properly and within specifications
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Photolithography Overview for MEMS
nanoscale.unl.eduPhotolithography is the process that defines and transfers a pattern onto a thin film layer on the wafer. In the photolithography process a light source is typically used to transfer an image from a patterned mask to a photosensitive layer (photoresist or resist) on a …
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