Ultrahigh-Purity Valves for Atomic Layer Processing, ALD ...
4 Bellows- and Diaphragm-Sealed Valves ATOMIC LAER DEPOSITION Ordering Information and Dimensions (ALD3 and ALD6) Dimensions, in inches (millimeters), are for reference only and are subject to change . 1 .061 (26 .9) 1 .06 (26 .9) Four mounting holes, M5 × 0 .8-6H thread, 0 .25 (6 .4) deep, located 45° from center line,
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