Ultrahigh-Purity Valves for Atomic Layer Processing, ALD ...
for a 1 .125 in . 2-port valve with standard actuator 6LVV-MSM-ALD3T-W3-P-C for a 1 .5 in . 3-port valve with thermal actuator Ordering Information and Dimensions (ALD3 and ALD6) Dimensions, in inches (millimeters), are for reference only and are subject to change . 1 .49 (37 .8) Air inlet 1/8-27 NPT A Normally Closed Standard Actuator 1.5 in ...
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