Process Monitor & RGA “REPROS/REGA/SEPION”

1 Process Monitor & RGA REPROS/REGA/SEPION - 1 - ULVAC Instrument Group 1. SEPIONII N2 CO2 ULVAC SEPION 1) Q 2) 3) 4) DEGAS RS-232C/485 PC 4 I/O 2 Windows 20 SEPION 2 SEPION SEPION ULVAC 1 SEPION RF SE102 ULVAC 1 SIM-SE/ST ULVAC 1 ULVAC 1 TMP

2 TMU071 PFIFFER 2 MVP015-4 PFIFFER 1 SP1/WP-01 ULVAC 1 ULVAC 1 VULP10CM ULVAC 1 GI-M ULVAC 1 951-7172 ANELVA 1 ULVAC 1 QCS2001 ULVAC 1 ULVAC 1 ULVAC 1 ULVAC 1 Process Monitor & RGA REPROS/REGA/SEPION - 2 - ULVAC Instrument Group ULVAC 1

3 TMP TMU071 PFIFFER 1 GHD030 1 GP1000 ULVAC 1 GI-M ULVAC 1 VULP16KF ULVAC 1 VULP25KF ULVAC 1 VULP25KF ULVAC 1 SS-4BK Cajon 5 ULVAC 1 2 ULVAC 1 ULVAC 1 TMP PFIFFER 1 PFIFFER

4 1 SEPION ULVAC 1 O/H PFIFFER 3 TMP PFIFFER 3 1 ( PC ) Process Monitor & RGA REPROS/REGA/SEPION - 3 - ULVAC Instrument Group 3 SEPIONII SE102P SEPIONII SE102 M/e 1 100 10 3Pa ( ) 2mA/Pa 2 10 10Pa N2 M M 1M 2% B-A Ir/Y2O3 2 40eV DEGAS 2 (SEM) OFF-AXIS EM (Cu-Be) SEM -1 -3kV 10-5 + N15 N14 LK01-1003-EM-000-00 & RF AC100V 3A 240 100 380mm(W H D) [SEPION ] 125 100 185mm(W H D)

5 [RF ] 5kg[SEPION ] 2kg[RF ] AD/DA+DI/O POWER ON FIL/SEM/RF ON FIL/SEM/RF ERROR AC100V 1A 200W 50H 380D RS-232C/485 POWER ON

6 2 Process Monitor & RGA REPROS/REGA/SEPION - 4 - ULVAC Instrument Group TMU071 (PFIFFER) 2 60L/s N2 1010 N2 TMP TC600 (PFIFFER) 2 TMP I/O MVP015-4 (PFIFFER) 140 140 308mm(W H D) 5L/min 50Pa 7000 = 300 G-TRAN SP1/WP-01 (ULVAC) 10-1 103Pa 190g LED POWER,ERR,SET1,SET2 GI-M (ULVAC)

7 240 99 380 W H D 10-8 101Pa /SW POWER, FIL, SET1, SET2, Parameters SEPION 150 15 C 240 C AC100V 2A VULP10CM ULVAC UHV to 10 Pa 951-7172 ANELVA UHV to 10 Pa SEPION TMU071 (PFIFFER) 60L/s N2 1010 N2 TMP TC600 (PFIFFER) TMP I/O Process Monitor & RGA REPROS/REGA/SEPION - 5 - ULVAC Instrument Group GHD-030 ( ) 280 166 120mm(W H D) 30L/min GP1000 (ULVAC) 50 99 260mm(W H D)

8 10-1 103Pa Parameters GI-M (ULVAC) 240 99 380 W H D 10-8 101Pa /SW POWER, FIL, SET1, SET2, Parameters VULP16KF UHV to 10 Pa VULP25KF UHV to 10 Pa VULP25KF UHV to 10 Pa SUS304 Ultra-Torr 3/8 2 SUS304 KF25 SS-4BK Cajon 5 UHV to 10 Pa U SUS304 AC100V 20A AC200V AC100V POWER ON

9 SEPION START/STOP SEPION WARM UP SEPION V1 OPEN/CLOSE V2 OPEN/CLOSE BAKE ON/OFF START/STOP V3 OPEN/CLOSE Process Monitor & RGA REPROS/REGA/SEPION - 6 - ULVAC Instrument Group V4 OPEN/CLOSE V5 OPEN/CLOSE V11 OPEN/CLOSE V12 OPEN/CLOSE V13 OPEN/CLOSE V14 OPEN/CLOSE V15 OPEN/CLOSE Setup 5 SEPION SETUP SETUP push IG1 SETPOINT IG2

10 SETPOINT