資料2－1（131216 2030時点） [互換 ... - mlit.go.jp

1 1 *1 *2 12000140001 1,935 2009 40,00050,0003 2,669 3 7,155 4 1,151 600080001000010,00020,00030,000200040000 2011 2013 2015 01998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 GPS,RFID *1 2012 / *2 XXII 2 MEMS MEMS MicroElectroMechanicalSystemsMEMS Micro Electro Mechanical Systems / MEMS IC MEMS 3 1263 [ ]

2 MEMS 1 5606 MEMS 1 5502 10 MEMS MEMS 8434 MEMS 7227 23 MEMS MEMS 3680 2010 2015 2020 MEMS MEMS/ Green Sensor Network Project Fine MEMS Project MEMS/ MEMS/ MEMS/MEMS BEANS Project 3 9 RF ) RF MEMS Si 2 ) AF 4 NEDO ( ) ( ( ) ( ) ( ) ( ) ( ) ( ( ) ( ) ( ) ( ) ( ) - ( ) ( ) ( ) ( ) ( ) ( ) ( ) 50 20mm 45mm MEMS 10 LSI IC 3 10cm LSI 2050 IC 20mm 50mm 2 cm x 5cm5 ( MEMS (1) 1)

3 MEMSMEMS (2) (2) (3) (3) CO2CO2 CO2CO2 CO MEMS 1/10 1/50 VOCVOC CO2 Polymer VOC Si 1/10 (4) (4) VOC 6 1/10 1/100 VOC (1)(1) 10% (2)(2) (2) (2) (3) (3)

4 22 CO2 CR CO2 33 CR 44 7 MEMS MEMS/ Green Sensor Network Project Fine MEMS Project MEMS/ MEMS/ MEMS/MEMS BEANS Project 3 9 RF ) RF MEMS Si 2 ) AF 8 ( ( Acoustic Emission 10kHz MHz)

5 9 GNSS/GPS EM(Elasto-Magnetic Sensor AE AE 10 GNSS 11 90uW@120Hz300uW@500lx100 W@30H TOCOS microGen 100uW@30Hz 28W@20 / @20m/s12 13 ( AE ( 14)))

6 15 NEDO NEDO I. AE ) II. III. IV. 16 17 18 NEDO

7 MEMS 19 / / 20 NEDO 21