Transcription of TAMA CHEMICALS CO., LTD
1 tama CHEMICALS CO., LTD TMAH( )TMAH TMAH Tetramethyl ammonium hydroxide TMAH TMAH TMAH TMAH NaFeKCaNaFeKCaTMAH No. 75-59-2 1) 2) 5 ( 63 C) 3) 4) TMAH25% 5) LD50 34 50mg/kg(100%TMAH) LD50 112mg/kg(100%TMAH) 25% 5L 20L 200L 18L 200L 1000L 50 10 TMAH25% 10 10 10 Particles m(pcs/mL) TMAH byweight(%)Carbonateas CO2(%)Metallic impurities (ppb)Particles m(pcs/mL) TMAH byweight(%)Carbonateas CO2(%)Metallic impurities (ppb)
2 Cl(ppm) 500 5 5 5 CH3+H3 CNCH3OH- CH3
