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Forward Moving Vibrating Plate

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MEMS ACCELEROMETERS - University of Michigan

MEMS ACCELEROMETERS - University of Michigan

www-personal.umich.edu

dynamic - caused by moving or vibrating the accelerometer. There are many types of ac-celerometers developed and reported in the literature. The vast majority is based on piezo-electric crystals, but they are too big and to clumsy. People tried to develop something smaller,

  Moving, Mems, Accelerometers, Vibrating, Mems accelerometer

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