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Implant straggle and mask proximity effect

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Lateral ion implant straggle and mask proximity effect ...

Lateral ion implant straggle and mask proximity effect ...

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1946 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 50, NO. 9, SEPTEMBER 2003 Lateral Ion Implant Straggle and Mask Proximity Effect Terence B. Hook, J. Brown, Peter Cottrell, Fellow, IEEE, Eric Adler, Dennis Hoyniak, Jim Johnson, and Randy Mann

  Effect, Implants, Masks, Proximity, Straggle, Implant straggle and mask proximity effect

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