Lecture Microstructures In Polymers

Introduction to Plasma Etching Lecture

Exacerbated by polymers that deposit well at the top of features, but deposit poorly deeper down the feature Bowing. ... Ion deflection due to differential charging of microstructures Microtrenching Clarycon Schaepkens, APL, (1998) Bogart, JVSTA, (2000) Lam Research Corp. 28

  Lecture, Polymer, Microstructures