Search results with tag "Implant straggle and mask proximity"

Lateral ion implant straggle and mask proximity …

HOOK et al.: LATERAL ION IMPLANT STRAGGLE AND MASK PROXIMITY EFFECT 1947 Fig. 2. Contour plot of simulated doping near resist mask edge. Only boron

  Effect, Implants, Masks, Proximity, Implant straggle and mask proximity, Straggle, Implant straggle and mask proximity effect