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Ultrathin Hafnium Oxide with Low Leakage and …

Ultrathin Hafnium Oxide with Low Leakage and …

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Ultrathin Hafnium Oxide with Low Leakage and Excellent Reliability for Alternative Gate Dielectric Application Byoung Hun Lee, Laegu Kang, Wen-Jie Qi, Renee Nieh, Yongjoo Jeon, Katsunori Onishi and Jack C.Lee

  Reliability, Gate, Alternatives, Dielectric, Excellent, And excellent reliability for alternative gate dielectric

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