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1 2015 9 20 1 1/2 < ULVAC >2< ULVAC >3< >4< >4< >5< ULVAC >5< ULVAC >5< >5< LPCVD RTP >5< >5< >6< SEM >6< >6< >6< >7< >7< >7< >7< >8< >8< >8< >8< CR >8< >8< >8< >9< >9< >9< ULVAC >9< ULVAC >10< ULVAC >10< ULVAC >11< >11< >13< >13< ULVAC >13< ULVAC >14< >15< >15< >16< >16< >16< >16< >16<He >17<EB >17 2015 9 20 2 2/2 <RF >17<DC >18<AC >19< >19< >19< >19< >19< >19< >20< >20< >20< ULVAC Ceraus>20< >21< >21< >21< AMAT ENDURA>22< >22< 5000>25 RS15-1047DC DCL-1000(20kW) ULVAC2002 + RS15-1049DC DCL-1000(20kW) ULVAC2002 + RS15-1048DC DCL-1000(20kW) ULVAC2002 + RS15-1050DC DCL-1000(20kW) ULVAC2002 + RS15-1045DC DCL-1000(10kW) ULVAC2002 + RS15-1046DC DCL-1000(10kW)

2 ULVAC2002 + RS15-1044RF RFS-1310A/MBX-10 EAULVAC2002 *MBX-10EA+ RS15-1043 U12 HSP/C30 VUCI0007337VC22102002 + RS15-1027 SRH-820 ULVACMA02-10282003 RS15-1025 CERAUS Z-1000 ULVACME95-1042 WT06-10010A 2C2T S3 6 S4 8 TMP AA-10S 2007 RS15-1026 C-7540 HCANELVAEVP-307821996 Au Cu RS15-1041 TMP-1003LM/EI-1003M FZM-5432000 +EI-1003M+ RS15-1042 TMP-1003LM/EI-1003M 2000 +EI-1003M+ RS15-3004 NESLABIIINESLAB197329002 3 RS15-3005 NESLABIIINESLAB197316042 P376 3 RS15-3006 NESLABIIINESLABD9607029 3 RS15-1053 PDR-090 CLULVAC2002 + RS15-1051 PDR-090 CLULVAC2002 + RS15-1052 PDR-090 CLULVAC2002 + RS15-1040 GP-1 SRYULVAC2002 + RS15-1036 GP-1 SRYULVAC2002 + RS15-1039 GP-1 SRYULVAC2002 + RS15-1038 GP-1 SRYULVAC2002 + RS15-1037 GP-1 SRYULVAC2002 + RS15-2020 GP-1 GULVAC08239G2015 CD RS15-2019 GP-1 GULVAC08238G2015 CD RS15-1054 A2KH-50 ULVAC2002 + RS15-1056 A2KH-50 ULVAC2002 + RS15-1055 A2KH-50 ULVAC2002 + RS15-1028 GI-M2 ULVAC2002 + RS15-1029 GI-M2 ULVAC2002 + RS15-1030 GI-M2 ULVAC2002 + RS15-1035 GI-M2 ULVAC2002 + RS15-1031 GI-M2 ULVAC2002 + RS15-1032 GI-M2 ULVAC2002 + RS15-1034 GI-M2 ULVAC2002 + RS15-1033 GI-M2 ULVAC2002 + < ULVAC > RS15-1027 SRH-820 ULVACMA02-10282003 RS15-1025 CERAUS Z-1000 ULVACME95-1042 WT06-10010A 2C2T S3 6 S4 8

3 TMP AA-10S 2007 RS15-2010 SH-450-T10 ULVACMB03-5006 CA3 2015 9 20 3 RS15-2008 SH-550 LULVACMH92-10801992 2012 TMP UTM-2300 D-950DK GI-TL3 *3 GP-1 SRY(C) MKS PRC-C-1C DC DC DC(DCS-0202B) PHS-07 1 4in*6set SP-UP RS12-1061 CERAUS Z-1000 ULVACME02-80122002 Multi_Chamber E3T 6in Etch ICP SP1 3 Metal Infrared Lamp GPCS-300GT TMP +CryoTrap RS12-1062 CERAUS Z-1000 ULVACME93-50211994 Multi_Chamber 1E1T 6in Etch ICP SP Metal Infrared Lamp GPCS-300GT TMP +CryoTrap RS13-3017 CS-200 ULVACMA07-10092007 12in ( 1 SP RF 3 Wx1 TMP+DRP 6in RS12-1227 IBS-6000 ULVACMB04-10122004 RS12-1118 MLX-3000 NULVACME00-50162000 Multi_Chamber 1E2T2C 5in Etch 2 SP1 Metal SP2 Metal Infrared Lamp 2 CRYO RPRS13-1115 MLX-3000 NULVACME96-10641997 2C3T1E)

4 RS13-3127 MLX-3000 NULVACME99-1017 Multi_Chamber 1E1T1H2C 5in Etch 2 SP Metal 2 CRYO RPRS14-4024 MLX-3000 NULVACME97-105019988 RS14-1242 MPS-2000 ULVACMB99-10212000 RS13-2209 PME-200LE LPO)ULVACMA08-35362010 3 2 140 mm 180mm DRY P3 P4 UV P5 300 1 RF 3KW RS14-2292 SBH-2306 ULVACME57-50341983RS13-2204 SH-350-D06( ULVACMH62-50731988 150mm 1 ULK-06A) D-650D AOJ2 RS14-2010 SH-350EL-C06 ULVACMA98-50161999LL 125 DC RF 3 RS12-1405 SH-450-C10 ULVACMH61-0502(NH8978)1987 6in 3 DCx1 RFx1 (500W) CRYO RPRS14-2268 SIH-1010 ULVACMA01-5007-02002 Vacuum System CP U10PU C15R MBS RP D-650DK Vacuum Gauge Ion Gauge GI-M2 Pirani Gauge*3 GP-1 SRY C Barat on Gauge MKS PRC-C-1C Sputtering Power Suppy DC DC DC DCS-0202B Heater Power PHS-07 Sputtering Cathode 1source (5in*10in*6t Dual Cathode RemodelingOK SP-UP Trace ITO RS13-1116 SIH-3030 ULVACMH63-52602007RS14-1241 SIH-450 ULVACSA00-0005-12000 SP CRYO-U12H RS11-1021 SIV-850 ULVACMA06-10062006 850 900 3 RF CRYO+RPRS11-1022 SIV-850 ULVACMA03-10122006 850 900 3 DC CRYO+RPRS14-2259 SME-200 EULVACMA04-10442005CR Au Cr Wsi 6in( 220 10 DC 2 RS14-2301 P3 P4/CH P3 P4 SME-200 EULVACMA04-500420051C3T Ti TiW(W))

5 Ni Si Au RFS-1305A*2 DCS0202B*2 RFS-1310A*3 Pinacle*1RS13-2208 SME-200 LDM(LCO)ULVACMA08-36252010 6 1 150 mm 200mm DRY P2 P6 300 5 P7 300 1 Cu P2 P6 RF 5KW P7 DC 4KW P3 RS11-2043 SMR-2110 EULVACME58-01611983RS13-1002 SRH-420 ULVACMA04-34292004 2C1E3T 8in SP1 Metal SP2 Metal SP3 Etch RIE RS14-1118 SRH-420 MCULVACMA02-1038 3 ICP RS13-3030 SRH-820 ULVACMA00-10342001 200 1 5 5RS11-1186 SV-9040-T14 ULVACMA00-10132001 5in 18in 3 DC TMP+RPRS10-2807 Z-1000 ULVACME00-7820 Multi_Chamber 2T 6in SP1 Metal SP2 Metal Infrared Lamp GPCS-300GT TMP +CryoTrap RS10-2808 Z-1000 ULVACME00-7818 Multi_Chamber 2T

6 6in SP1 Metal SP2 Metal Infrared Lamp GPCS-300GT TMP +CryoTrap RS15-1001 SIH-300 RDULVACMA08-70042009 DEPO 6 420*420 3 Ti Cu Ni-Cu 135*47 TMP+RP GAS Ar DC6KW RF1KW < ULVAC > RS15-1026 C-7540 HCANELVAEVP-307821996 Au Cu RS12-1027 - -1992 100 DC RPRS13-8022 E-102 6127-031986 AC100V 50/60Hz 1 KVA 80 RP 501-min) RS11-1185 ENDURAAMATS/N:3843/E-No 65201996 Multi_Chamber 8in Etch 1 SP RS11-1201 HRS-521A 1M90621994 4in 3 RF RS12-1228 L-350S-CANELVAEVP-305771996 5 DC RF RS11-1184 SPC-530 HANELVAEVP-13998-11983 ) 5in 15in 3 DC/RF DP2004 RS14-3037 SPF-530 FANELVAEVP-2252819916 3 ITO RF/DC RS12-2027 SPF-540 HANELVAEVP-24622 6in 3 RS12-1380 ( SPH-2019F 02-41912003 5inx7in MgCa 3 DC/RF RS13-1155 SRL-3320 420125402001 RF TMP RS14-1223 TLS-300F YA11-30411996 TMP+RP LN2 TMP-550-L+GDH-360 4inx3 SP TiO Si Pt Ti BLT DC PEAL DP-1500-8 RF PEAL RP-500C 3 RF CONT ZDK-916B 3 MAX550 C GAS.

7 Ar O2 N2 2 CWC-1100B/CWC-2000 , RS15-1002 SPH-2500-RF 00-4422RS12-2033 ECR-300 EANELVAEVP-198811990 2015 9 20 4 < > RS14-2289 ANELVAEE9951422001RS13-3016 VEP-1000 ULVACMF06-10082007 RS14-2266 EL SOLCIET ULVACMH98-5013-01999 Vacuum System CP U6H*2 CP-Compressor[C10*2] TMP[TMP-403LM]RP[D-240DK*3] Vacuum Gauge Ion Gauge[GI-TL3RY*3] Pirani Gauge*5[GP-1 SRY C ] Bias RF Power Sup RF[RFS-02CA] Trace Metal&Organicmaterial RS11-3206 SOLCIETULVACMF96-5002 EL RS13-2200 SGC-22SA-RF 00-45612000 900 1125H SUS EB JEOL) JEBG-102 UHO 15 JST-10F 10Kw) RP(VS-2401)+PMB(PMB-006CM)+DP SFD-22B + (PFC-550) RF Kw) / SOCS-1 / CRTM-6000( / - RS14-1226 SGC-22SA-RF 97-4334RS14-1227 SGC-22SA-RF 94-4371RS14-1180 EX-900-C16 ULVACMH89-20541990 8 RS09-2143 EX-650-C16 ULVACMH97-5033 750W 900H 10 CRYO RP RS11-1191 EX-550-D10-BULVACMH90-1086 650W 800H DP LN2 RPRS14-2295 EX-550-D10( C ULVACMH89-7048-01990RS11-2397 EX-550-C10 ULVACMH96-10511996 650Wx800H EGL-35M 2 Au Sn CRYO+RP EB 2 EB RS11-3233 EX-550-C10 ULVACMH97-50261998 650W 800H CRYO RPRS13-2355 EX-550-C10 ULVACMH97-50191998 EB U-10PU D-950DK HPS-1000F LED O2 CRTM-7000 Au Cr Ti Ni EGL-35M+ PSG-004S EGC-10S RS14-1181 EROLAULVAC.

8 +DRP L/L CRTM-9000 RS12-1428 EBX-8C ( ULVACMH59-01121984 500 600H 100 (EGL-35M) CRYO RP :O2) RS12-1233 EBX-8 CULVACME58-50391984 500 600H EGL-206M CRTM-9000 CRYO RPRS13-2099 EBX-8 CULVACME58-50581983 500 600H 150 ( 3 CP RPRS14-2012 EBX-8 CULVACME59-50821985 2 10 RS14-2293 EBX-8 CULVACME89-50431990RS14-2294 EBX-8 CULVACXC03-40121990RS14-1110 EBX-6 DULVACMH60-02421985 3 12 2 ULK-06A RS12-1214 EBX-16 CULVACMH89-70431989 750Wx900H EGL-35M) 10 W( CRYO+RP RS11-3014 EBX-10 DULVACSE59-1362-41885 650W 800H 3 DP RP RS12-1419 ( EBX-10 DULVACSE56-1351-31981 650W 800H 3 DP RP EB RS10-2175 EBX-10 CULVACSE58-1359-4 600W 800H.))

9 EGL-35M 10kw CRYO RPRS13-1153 EBX-1000 CULVACMA00-10602001 C30 HPS-1000 FRS13-1038 EBS-10A ULVACXJ99-70010A1999 U-12 HSP(C30MT +PMB-003C+D-950DK 0 10 W 4 6 RS13-2205 EBS-10 AULVACME54-00031979 2006 AUTO/MANUAL AL In Sn JRA-050) 50 75 Torr8/C30V RP D-650 PMB-003C E/B EGL-35M HP1010SG 1 MFC A 100 CRTM-6000RS12-1080 EBH-6 ULVACMH62-50222005 RS14-2280 BMC-700 SHINCRON9000731990RS14-1087 -Veetech-1992RS14-2360 EX-400-C08 ULVACMA00-5024 OK RS14-2361 L-300 KANELVAEVP-37391 OK RS14-2262 IPM-100 Load Lock ULVACMF03-51042004 Main Vacuum System CRYO U-10 PUS) H2 mater)+(C2W-U 99633hr) Load Lock Chamber Vacuum System Turbo-molecular pump UTM-350FH/D1A) Vacuum Control System mks TYPE 113 Vacuum Gauge Ion Gauge(GI-TL3RY)*2 Pirani Gauge*5 GP-1 SRY(A) Quartz crystal deposition controller (CRTM-6000) Deposition Source Erectron Beam Source EB EGO-35) PowerSupply EB HPS-510S)

10 Ion Plating System RFS-02CA*2 Trace Mo/Cr/Al/Al2O3 < > RS12-1318 CVD PD-270 STASAMCO2001 TEOS-CVD C2F6 Ar O2 N2RS14-3045 CVD P-5000 MXP DXZ AMAT11738 RS10-2769 CVD DWNT ULVACMB03-70022003 CVD MAX1100 C RP H2 10 SLM Co 10 SLM 200mm 600mmRS12-1145 CVD CPD-1210 ULVAC- CVD 200 SiH4 O2 N2RS13-2010 CVD RS13-8129 8132 CME-200 JULVACMA07-5012-02008 156 H2, SiH4, N2, B2H6,PH3, CO2, Si 2 4 2 2 4 2 RS14-2359 CVD CC-200 ULVACMA03-5033 OK RS13-1031P-CVD P-CVD ULVACMH61-11121986 2015 9 20 5 < > RS13-3031 VA-1000 ULVAC221520012013/5 RS11-2405 UNA-2000 NULVACRE93-1003 C to C 600 1000W 2450 MHz 50 MHz 200W RF RS12-2079 UNA-2000 ULVACXS06-46041992 C to C