Transcription of 1 Conflat(CF) 플랜지 - vmt.co.kr
1 1) Conflat(CF) .. : (ridge) =20 , : = 2 30 . a: (apex), , (flat edge) = , , R = ( ). R = ( ). d: e: = . = ( ). b: (depth of bite)= T: = 2mm;. 1 , Conflat(CF) . 1, Conflat(CF) (mm) a).. A B C D E P F H OD-ID-T. SS Al .. 16 8 M4-20 6 6 25 10 M5-25 6 6 40 13 M6-35 6 6 63 18 M8-45 8 8 100 20 M8-50 16 16 160 23 M8-60 20 20 200 25 M8-60 24 24 250 27 M8-65 32 32 300 30 M10-75 36 - 320 310 320 30 M10-75 - 24 SS: , Al: . a) . , OD B . b) (surface roughness) 1S( 1 m) . 1/5. 2 , Conflat . [kg cm] [kg cm]. ( ). 1 2 3 4 5 6 7 . M4 10 20 20 30 10 20. M6 40 60 70 100 20 40 70. M8 80 100 100 150 20 40 70 100. 60 80. M10 180 220 120 250 20 40 80 120 160 200. 70 100 140 180.. 2), Capture Seal(CS).
2 1) 250 450mm . 2) (O ring) . 3) Viton . 2, Capture Seal(CS) ( ANELVA ). 3, Capture Seal(CS) .. A B L1 L2 H1 H2 . 300 300 384 30 150 150 20 350 350 434 30 150 150 24 400 400 484 34 150 150 24 mm. 2/5. 3), KF . 3 KF . (a) , (b) (c) . (d) ( ). 4 , KF (mm). A B C. 10 14 30. 16 20 30. 20 24 40. 25 28 40. 32 36 55. 40 55. 50 75. 3/5. 4), (KS B1540). 4, (KS B1540). 5, (mm) (KS B1540).. d D T. f g C x H G W S .. 10 70 10 8 1 38 50 M8x4 10 24 5 3 4. 20 80 10 8 1 48 60 M8x4 10 34 5 3 4. 25 90 10 8 1 58 70 M8x4 10 40 5 3 4. 40 105 12 10 1 72 85 M8x4 10 55 5 3 4. 50 120 12 10 1 88 100 M8x4 10 70 5 3 4. 65 145 12 10 1 105 120 M10x4 12 85 5 3 4. 80 160 14 12 2 120 136 M10x4 12 100 5 3 4.
3 100 185 14 12 2 145 160 M10x8 12 120 5 3 4. 125 210 14 12 2 170 185 M10x8 12 150 5 3 4. 150 235 14 12 2 195 210 M10x8 12 175 5 3 4. 200 300 18 16 2 252 270 M12x8 15 225 8 6. 250 350 18 16 2 302 320 M12x12 15 275 8 6. 300 400 18 16 2 352 370 M12x12 15 325 8 6. 350 450 - 20 2 402 420 M12x12 15 380 8 6. 400 520 - 20 2 458 480 M16x12 19 430 8 6. 450 575 - 20 2 511 535 M16x16 19 480 12 7 10. 500 625 - 22 2 561 585 M16x16 19 530 12 7 10. 550 680 - 24 2 616 640 M16x16 19 585 12 7 10. 600 750 - 24 2 672 700 M20x16 23 640 12 7 10. 650 800 - 24 2 722 750 M20x20 23 690 12 7 10. 700 850 - 26 2 772 800 M20x20 23 740 12 7 10. 750 900 - 26 2 822 850 M20x20 23 790 12 7 10. 800 955 - 26 2 877 905 M20x24 23 845 12 7 10.
4 900 1065 - 28 2 983 1015 M22x24 25 950 12 7 10. 1000 1170 - 28 2 1088 1120 M22X24 25 1055 12 7 10. 4/5. 6, a) 1).. natural gum -30 60 -65 75. S Butadiene-styrene -25 75 -55 100. , Isobutylene-isoprene - - -55 150. N, Butadiene-acrylonitrile -25 85 -50 150.. Chloroprene -40 90 -50 150. Dimethyl polysiloxene -40 180 -120 250. Viton,Vinyldene fluoride- -15 200 - 270. Hexafluoropropylene Kalez,Tetrafluoroethylene- -12 315 - - perfluoromethylvinyl Ether Teflon, -190 280 - 400. Polytetrafluoroethylene Kapton, -190 300 - - Polypyromellitimide a) (elastomer), (plastomer) . 1) , , , (2000 6 ), 5/5.