3.3 Chambers and components / Valves / Venting …

1 280 / Part Chambers and components / Valves / Venting Valves / Venting valve, manual , dn 10 Chambers and components / Valves / Venting Valves / Venting valve, manual , dn 10 ISO-KFVenting valve, manual , dn 10 ISO-KF Manually operated screw cap for Venting with ambient airFlanges according to ISO 2861 DimensionsVenting valve, manually actuated, stainless steelVenting valve, manually actuated, brass, nickel-platedA40 mm40 mmB30 mm30 mmTechnical dataVenting valve, manually actuated, stainless steelVenting valve, manually actuated, brass, nickel-platedFlange (in) dn 10 ISO-KFDN 10 ISO-KFTightness1 10-10 Pa m3/s1 10-10 Pa m3/sSealFKM (valve seal)FKM (valve seal)Pressure range1 10-8 hPa to 3000 hPa (abs.)

2 1 10-8 hPa to 3000 hPa (abs.)MaterialsStainless steelBrass, nickel-platedTemperature range-30 to 130 C-30 to 130 COrder numberVenting valves120 VBE010140 VBE010 AccessoriesReducer Centering Ring, Stainless Steel 304 , dn 10 /16 Chambers and components / Valves / Pressure relief Valves / Pressure relief Valves , DN 16 and 40 ISO-KFPart / Page Chambers and components / Valves / Pressure relief Valves / Pressure relief Valves , DN 16 and 40 ISO-KFPressure relief Valves , DN 16 and 40 ISO-KF Housing material: Stainless steel Response pressure: 1200 to 1500 hPa (abs.) 120 VUS016 and 120 VUS040 with modifiable differential pressure to app. +/- 100 hPaDimensionsPressure relief valve, DN 16 ISO-KFPressure relief valve, DN 16 ISO-KFAT echnical dataAVA 016 XPressure Relief Valve, DN 16 ISO-KFPressure Relief Valve, DN 40 KFFlange (out)G 1/8"DN 16 ISO-KFDN 40 ISO-KFFlange (in)DN 16 ISO-KFDN 16 ISO-KFDN 40 ISO-KFTightness1 10-9 Pa m3/s1 10-9 Pa m3/s1 10-9 Pa m3/sSealFKMFKMFKMD ifferential pressurenot modifiablemodifiable to app.

3 +/- 100 hPamodifiable to app. +/- 100 hPaPressure range1 10-8 hPa to 1200 hPa (abs.)1 10-7 hPa to 500 hPa over pressure1 10-7 hPa to 500 hPa over pressureFlow rate l/minHousingStainless steelStainless steelStainless steelCan be opened to a pressure difference of200 to 500 hPaapp. 400 hPaapp. 200 hPaTemperature range0 to 50 C5 to 60 C5 to 60 COrder numberPressure relief valvesPF I30 282 / Part Chambers and components / Valves / Gas dosing Valves / Coarse gas dosing valve, manual , dn 10 Chambers and components / Valves / Gas dosing Valves / Coarse gas dosing valve, manual , dn 10 ISO-KFCoarse gas dosing valve, manual , dn 10 ISO-KF For slow, manual Venting Service life: 200000 operating cyclesCharacteristicDimensionsTechnical dataEVD 010 HFlange (in) dn 10 ISO-KFFlange (out) dn 10 ISO-KFBakeout temperature100 COperating pressure hPa (abs.)

4 Operating pressure 10-7 hPaTightness1 10-9 Pa m3/sSealFKMGas flow max. 103 hPa l/sGas flow min. controllable40 hPa kgCan be opened to a pressure difference of3000 hPaOrder numberGas dosing valvesPF I22 Chambers and components / Valves / Gas dosing Valves / Coarse gas dosing valve, manual , dn 10 ISO-KFPart / Page 283 ValvesGas dosing valve with separate shut-off valve, manual , DN 16 ISO-KF Closable without changing the gas flow setting Optimum characteristic Digital position display Excellent reproducibility Extremely small dead volume Very broad regulating rangeCharacteristicDimensionsTechnical dataEVN 116 Flange (out)DN 16 ISO-KFFlange (in)DN 16 ISO-KFBakeout temperature.

5 Flanges150 CTightness1 10-10 Pa m3/sSealFKMD ifferential pressure2500 hPaDosing sleeveFluorplastomerGas flow max. controllable1000 hPa l/sGas flow min. controllable5 10-6 hPa l/sHousing/needle/filterStainless kgTemperature: Operating80 CDead cm3 Order numberGas dosing valvesPF I32 284 / Part Chambers and components / Valves / Gas dosing Valves / Coarse gas dosing valve, manual , dn 10 ISO-KFValvesAll-metal gas dosing valve, manual , DN 40 CF Minimum dead volume Operating temperature up to 200 C For mass spectrometer applications Specific routing of gas stream when a capillary (accessory) is usedDimensionsUDV 040, All-metal gas dosing valveUDV 046, All-metal gas dosing valveTechnical dataUDV 040 UDV 046 Flange (out)DN 40 CF-FDN 40 CF-FFlange (in)VCR 1/4"DN 16 CF-RActuatorManualManualOperating pressure1 10-10 hPa to 1500 hPa (abs.)

6 1 10-10 hPa to 1500 hPa (abs.)Tightness1 10-12 Pa m3/s1 10-12 Pa m3/sInlet pressure 10-10 hPa to 3 MP1 10-10 hPa to 3 MPGas flow max. at inlet pressure of 1000 hPa600 hPa600 hPaFlow rate min. for: air1 10-9 hPa l/s1 10-9 hPa l/sFlow rate min. for: pure gases1 10-10 hPa l/s1 10-10 hPa l/sHousingStainless steelStainless kgTemperature: Bakeout350 C350 CTemperature: Operating200 C200 CValve seatCopperCopperValve plateSapphireSapphireOrder numberGas dosing valvesPF I52 031PF I52 035 AccessoriesComplete capillary, vacuum side, length 1 mPT 418 976 -TPT 418 976 -TComplete capillary, inlet side, length 2 mPT 420 537 -TPT 420 537 -THeater, 200 CPT 420 376-TPT 420 376-TCCCDN 16 40 CF-F46 Chambers and components / Valves / Gas regulating Valves / All-metal gas regulating valve, manual /thermomechanic, DN 40 CFPart / Page Chambers and components / Valves / Gas regulating Valves / All-metal gas regulating valve, manual /thermomechanic, DN 40 CFAll-metal gas regulating valve, manual /thermomechanic.

7 DN 40 CF Minimum dead volume Operating temperature up to 200 C For mass spectrometer applications Specific routing of gas stream when a capillary (accessory) is usedDimensionsUDV 140, All-metal gas regulating valveUDV 146, All-metal gas regulating valveTechnical dataUDV 140 UDV 146 Flange (out)DN 40 CF-FDN 40 CF-FFlange (in)VCR 1/4"DN 16 CF-RActuatorManual/thermomechanicManual/ thermomechanicOperating pressure1 10-10 hPa to 1500 hPa (abs.)1 10-10 hPa to 1500 hPa (abs.)Tightness1 10-12 Pa m3/s1 10-12 Pa m3/sInlet pressure 10-10 hPa to 3 MP1 10-10 hPa to 3 MPGas flow max. at inlet pressure of 1000 hPa600 hPa600 hPaFlow rate min. for: air1 10-9 hPa l/s1 10-9 hPa l/sFlow rate min.

8 For: pure gases1 10-10 hPa l/s1 10-10 hPa l/sHousingStainless steelStainless kgTemperature: Bakeout(Cable removed) 350 C(Cable removed) 350 CTemperature: Operating200 C200 CValve seatCopperCopperValve plateSapphireSapphireOrder numberGas regulating valvesPF I52 032PF I52 034 AccessoriesComplete capillary, vacuum side, length 1 mPT 418 976 -TPT 418 976 -TComplete capillary, inlet side, length 2 mPT 420 537 -TPT 420 537 -THeater, 200 CPT 420 376-TPT 420 376-TRVG 050 C, Control unit all-metal gas regulating Valves , 115/230 VPF I00 795PF I00 795 CAJON VCR 1/4 UDV 40 CF-F46 16 40 CF-F46 286 / Part Chambers and components / Valves / Gas regulating Valves / All-metal gas regulating valve, manual /thermomechanic, DN 40 CFValvesGas regulating valve EVR 116, motorized.

9 DN 16 ISO-KF High gas throughput Very broad regulating range With integrated motor control electronics CharacteristicEVR 116, Gas regulating valveIF 200, Interface for EVR 116IF 200, Interface for EVR 11610-610-510-410-310-210-11101001000012 345678910 USTG [V]Gasflow [mbar l/s]MEVR 116control valveDown-stream controlVacuu msystemVacuumgaugeVacuum pumpIF 200 PCGasMGasEVR 116control valveUp-stream controlVacuu msystemVacuumgaugeIF 200 PCVacuum pumpDimensionsEVR 116, Gas regulating valveIF 200, Interface for EVR Chambers and components / Valves / Gas regulating Valves / All-metal gas regulating valve, manual /thermomechanic, DN 40 CFPart / Page 287 ValvesTechnical dataEVR 116IF 200, Interface for EVR 116 ConnectionTerminalsFlange (out)DN 16 ISO-KFFlange (in)DN 16 ISO-KFControlRVC 300 or IF 200 Control60 CBakeout temperature: actuator80 CBakeout temperature: housingMounting railFixation2500 hPa (abs.)

10 Operating pressure 10-8 hPaOperating pressure 10-10 Pa m3/sTightnessFKMSealFluorplastomerDosing sleeve1250 hPa l/sGas flow max. controllable5 10-6 hPa l/sGas flow min. controllableStainless steelHousing/ kg40 gWeight0-10 V DCControl voltage< 3 / 4 sClosing/opening timeRS-232-CInterface5-40 CAmbient ASupply24 V DC24 V DCSupply: Voltage12 WOrder numberGas regulating valvesPF I39 931PF I00 091 AccessoriesRVC-EVR, connection cable, 3 mPT 583 115-TPT 583 115-TRVC-EVR, connection cable, 5 mPT 583 116-TPT 583 116-TRVC-EVR, connection cable, 10 mPT 583 117-TPT 583 117-TRVC-EVR, connection cable, 15 mPT 583 118-TPT 583 118-TRVC-EVR, connection cable, 20 mPT 583 119-TPT 583 288 / Part Chambers and components / Valves / Gas regulating Valves / All-metal gas regulating valve, manual /thermomechanic, DN 40 CFValvesGas regulating Valves , solenoid actuated, RME 005 A, DN 5 Two connections required as accessories Including connector Drive.