半導体工学（7） - 立命館大学

1 11 7 3 PN 2 z ][ mniAiNnn2 =iABiFnNTkEEln(3 26)ANp (3 25)(3 24)DiNnp2 +=iDBiFnNTkEEln(3 21)DNn (3 20)(3 19)N P z E vz [m2/V s]Ev = (3 27) 3 N [ ] [ ] P [ ] [ ] 5X1023[m-3] [m-3] ][105323 = mNnD][ ) (38232162 == mXXNnpDi += N ][ += +=E = (2) z p pz n N n>>p P n<<p )(11npnpq + ==(3 33)nDnNqnq = ==111pApNqpq = ==111(3 34)(3 35) 5 (1) 13(2) 4(3) 1cm3 4 4X10-8cm 1/(4X10-8)3X4= (4) [g/cm3] / (5) m m 1k m 3X10-3 cm=30 m8 m 3101406030 = x6 (8) (12) (13) (14)a 27 =HWLRW: L: H.

2 R [ cm] [ m] [ -1 m-1] =SLRHWL V IS W H 1= 8 [ ] [ ] [ ] [ ] [ ] [ ] [ ] [ ] [ ] [ ] 9 (Si) a= 10 11 (a) (As )(b) p (B )As SiSiSiSiSiSiSiSi B SiSiSiSiSiSiSiSi (As,P) ( ) (B) ( ) 12 (1)(3)(1)As EAs (3) EF EVECE = = += += += = = 313 (2)(4)(5)(2) n[m-3] p[m-3] As n=ND= [m-3]p=ni2/n p=( )2 p= [m-3](4) n s p s E=100kV/m v= nXE= [m/s](5) [ m] =1/(qXnX )=1/( )= [ m]14 P B III N As V - ( ) + ( ) 15 (1) 2inpn= EVECEEiEF> EiDNn DiiNnnnp22 =++++npDN pNnD+=(3 15)22iDDnNnpnNnn+ = + =022= iDnNnnDiDDNnNNn= ++=22421iDnN>QDiiNnnnp22 = N ND =TkEEnnBiFiexp(3 15)DNn= EF +=iDBiFnNTkEEln(3 21)(3 20)(3 19)

3 16 z ][ mniAiNnn2 =iABiFnNTkEEln(3 26)ANp (3 25)(3 24)DiNnp2 +=iDBiFnNTkEEln(3 21)DNn (3 20)(3 19)N P z E vz [m2/V s]Ev = (3 27) 17 (2) z p pz n N n>>p P n<<p )(11npnpq + ==(3 33)nDnNqnq = ==111pApNqpq = ==111(3 34)(3 35) 18 z JDPz JDNz D dxdpDqdxdpDqJppDP = =dxdnDqdxdnDqJnnDN = =TqkDnBn = TqkDpBp = (3 36)(3 37)(3 38)(3 39)419 z E Jdriftz Jp z Jn z J dxdpDqEpqJJJppDPdriftp =+= EpqJpdrift = dxdnDqEnqJJJnNDNdriftn + =+= (3 28)(3 40)(3 41)npJJJ+=(3 42)n -0>dxdn p + EnqJndrift = (3 29) 20 (1) (3 38) (2) (3 37) (3) (3 27) (4) ]/[ = = = ]/[ = = = ]/[ = = = ]/[ = = = 21 (1) p xx+dx dS{}{}dtdSdxxJxJqdxdStpdttppp + = +)()(1)()(Jp(x+dx)/qJp(x)/q p(t)p(t+dt) p p 22 (2) z z Edx+++++++++--------- dxdpDqEpqJppp = dxdnDqEnqJnnn + = G R{}{}dtdxdSRdtdxdSGdtdSdxxJxJqdxdStpdttp pppp + + = +)()(1)()( (3 40)(3 41)23 (3) nppRGdxdJqdtdp + =1{}{}dtdxdSRdtdxdSGdtdSdxxJxJqdxdStpdtt ppppp + + = +)()(1)()

4 (dtdxdS (3 48)ppppR 0 =ppppppGdxpdDEdxdpdtdp 022 + + =ppppRGdxdxxJxJqdttpdttp ++ = +)()(1)()(dttpdttpdtdp)()( +=dxdxxJxJdxJppp)()(+ =(3 46) (3 47)nnnnnnGdxndDEdxdndtdn 022 + + =dxdpDqEpqJppp = (3 43) (3 40) 24P N P zSi B( ) z ( ) ( ) N zSi P( ) As( ) z ( )P N 525PN (1) ( ) P N 26PN (2) PN z z PN 27PN PN P N (V) (I)PN =1expkTeVIsI I)