ADP / ADS Series Two - Vacuum Equipment and Repair …

1 alcatel Vacuum TECHNOLOGYADP / ADS Series TwoDRY PUMPS FOR THE SEMICONDUCTOR INDUSTRYUser s ManualADP/ADS Series Two dry pumpsAlcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWO1/1 Edition 02 - February 99 Dear Customer,you have just purchased anAlcatel dry pump. We thankyou and are proud to includeyou in our product has benefitedfrom alcatel s many years ofexperience in semi-conductor processes and dry : All semi-conductors processesStripping, Etching, PECVD, LPCVD, SACVD, MOCVD, Epitaxy Scientific researchADVANTAGES:Reduced volume and foot-print - Low operating cost -High performancies (pumping speed and ultimate pressure) -Excellent behavior in harsh environments - Easy integration -1/2 lobe technology - Advanced monitoring functions (Stand-byposition to reduce N2consumption, power failure protection) -SEMI S2-93 standard compatible (on option).

2 SPECIAL FEATURES:Multi-stage Roots technology - Water-cooled multi-voltage motors -Exhaust and utilities connections possible on top or at the rear ofthe pump - alcatel Network :106 298 GBEDITION:02 - February 1999 For optimum performanceand to obtain full satisfactionfrom this Equipment , werecommend that you studythis manual before any intervention on your pump,in particular, the chapter oninstallation and start Vacuum technology France - User s Manual ADP/ADS SERIESTWOUser s ManualADP/ADS Series Two1/2 Edition 02 - February 99 IntroductionStart-upnDry pump operational principle ..nADP/ADS Series Two dry pump range ..nM4 monitoring for P pump model..nMonitoring for ADP 122 L model..nOptions ..nTechnical characteristics ..nAccessories ..nSafety instructions ..nUnpacking / Storage.

3 NPositioning the pump in the pumping installationnInstalling anti-vibration pads (accessories) ..nFilling the machine oil housings ..nConnection to the cooling circuit ..nInert gas purge connection (N2 plug) ..nPump power supply ..nChecking the rotational direction and first pumpstart-up ..nConnection to the pumping circuit ..nJ14 Remote control plug connection ..nJ3 Remote control plug connection (ADP 122 L) .nEmergency stop plug connection ..nRS 232 or RS 485 link wiring ..nA 10nA 20nA 30nA 31nA 40nA 50nA 60nB 00nB 10nB 20nB 30nB 40nB 50nB 60nB 70nB 80nB 90nB 100nB 101nB 110nB 120 ContentsAlcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOUser s ManualADP/ADS Series Two2/2 Edition 02 - February 99 OperationMaintenanceMaintenance sheetnOperating modes (P model pumps).

4 NOperating modes (L model pumps) ..nStart-up of the M4 monitoring system ..nUse of the M4 monitoring system for pumpingoperation ..nUse of the pump ADP 122 L ..nThe M4 monitoring system parameters ..nM4 monitoring system function table..nWater flowrate and gas purge according tomain semiconductor processes ..nSaving and remote loading of pumpconfiguration (with M4)..nM4 monitoring setting for transport..nSafety instruction related to maintenance ..nFirst level of maintenance ..nMaintenance frequency ..nDiagnosis and troubleshooting ..nPump draining ..nExhaust maintenance ..nFreeing up the ADP ..nResseting maintenance parameters ..nC 10nC 11nC 20nC 30nC 31nC 40nC 50nC 60nC 70nC 80nD 00nD 10nD 20nD 30to D 140nE 10nE 20nE 30nE 40 Chapter AAlcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOUser s ManualADP/ADS Series Two1/1 Edition 02 - February 99 IntroductionnDry pump operational principle.

5 NADP/ADS Series Two dry pump range ..nM4 monitoring for P pump model..nMonitoring for ADP 122 L model..nOptions ..nTechnical characteristics ..nAccessories ..nA 10nA 20nA 30nA 31nA 40nA 50nA 601/3A 10 Dry pumpoperational principleAlcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOM ulti-stage RootsprincipleEdition 02 - February 99 The ADP pump consists of 5 Roots type two rotors rotate without touching each 1LP 2LP 3HP 4HP 5 WaterInletThe three stages on the low pressure side are called LP stages and the two stages on the high pressure side are called HP stages .Exhaust tube2/3A 10 Dry pumpoperational principleAlcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOT ightnesswith environmentTightness at lowpressure sideTightness at highpressure sideEdition 02 - February 99 The pump bearings on the low pressure side are fitted withceramic ball bearings lubricated with fluorinated grease whichresists high temperatures and the possible corrosion due tothe application.

6 An overpressure zone is created around the bearing byinjecting a neutral gas (Purge LP1).This pressurization prevents pumped gases from migratingtowards the gas purging for the bearings is imperative for bearings are lubricated byoil splashing. The oil sump is sealed fromstage HP5by a trap and Stage HP52- Cooling plate3- Water cooling4- HP5 purge5- Dynamic seal6- Lubrication disk7- Gear casing13257643/3A 10 Dry pumpoperational principleAlcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOE dition 02 - February 99 The pump in a pumpinginstallationTightness at motor side(shaft passage)Tightness at shutdownThe Vacuum tightness isensured by the motor designwith built-in jacket (hermetically sealed).This system provides totalsafety regarding leaksoutside the pump andrequires no Built-in jacket2- Motor housing3- Electrical rotor123 The pump is fitted with a antisuckback valve in the exhaust tube,preventing the exhaust being sucked 20 ADP/ADS Series Two dry pump range1/4 alcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOE dition 02 - February 99A new range ofAlcatel s dry pumpsfor every applicationAlcatel has developped a new range of dry pumps, operatingat high temperature, adapted to the differents processes used inthe semi-conductor industry.

7 Two pumping groups composed of an ADP 122 P combinedwith a Roots to make a fullyintegrated system ADS 602 Pand ADS 1202 122 ADS 1202 ADS 602 The range includes: ADP 122, which is availablein two versions: ADP 122 P: integrated ina covered frame including: the pump, the monitoring, the hand-held remote control,facilities, the flowmeter panel, the OEM interface, the 122 L: simplified modeldesigned for clean processes(load-lock and transfer chamberpumping).A 20 ADP/ADS Series Two dry pump range2/4 alcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOE dition 02 - February 99 Interfaces(for example ADP 122 P -utilities on top)InletMains power supplyExhaustinletoutletN2 purgeMain switchMains onElectricalinterfacesRear viewFront viewDisplay panelEmergency stop buttonHand-held remote control Water circuitA 20 ADP/ADS Series Two dry pump range3/4 alcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOE dition 02 - February 99 Internal equipmentof the pumpsThe P model pumps of the Series Two range include a coolingcircuit and an inert gas purge ADP 122 L model, especially designed for clean applicationslike load and transfer chamber pumping, does not include aninert gas purge inletWater outletInletExhaustAnti-suckback valveTemperaturesensorRootsCooling circuit(principle schema)

8 A 20 ADP/ADS Series Two dry pump range4/4 alcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOE dition 02 - February 99 Stop valvePressureregulatorManometerMassflowm eterCalibratedjetsAnti-suckbackvalvesPre ssuresensorN2 inletAnti-suckback valveExhaust12345M4 InletRootsADPHPHPLPLPLP P modelN2 purge circuitA 30M4 monitoring for P pump model1/2 alcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOE dition 01 - November 98 PrincipleTo improve the design flexibility of the products, alcatel has developped a new generation of electrical equipement for the cabinetIt is located at the rear of themachine. It is linked with mainpower supply,ADP/Rootsmotors and electronic cabinetIt ensures the pump automatic operation and controls allsensors and is linked to the display panel and emergency stop allows to exchange data with the hand-held remote controland ensures the interface with the supervision monitoring can be interfaced with the main boxElectricalcabinetHand-heldremote controlElectroniccabinetHand-held remote controlIt ensures can be used either fromthe front or the rear of thepump and allows the accessat all operation 30M4 monitoring for P pump model2/2 alcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOE dition 01 - November 98M4 monitoringcharacteristics Monitoring system controlled by microprocessor Display (on the hand-held)

9 Remote control) of parameters andmessages Memorization of the 10 latest alerts and alarms RS 232 - RS 485 - Network linksMain functions Motor protection N2purge monitoring Pump temperature monitoring and control Thermostatic control of the pump (Temperature and water flow) Exhaust pressure monitoring Maintenance time controlSupervision NetworkRemote control connectorOEM interfaceMainsEmergencystop outputRoots motorADP motorActuators(valves)SensorsPower boxElectricalcabinetHand-heldremotecontr olElectroniccabinetAlternative connectionAlternative connectionA 31 Monitoring for ADP 122 L pump1/2 alcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOE dition 01 - November 98 PrincipleTo improve the evolutivity of the products, alcatel has developpeda new generation of electrical equipement for ADP 122 cabinetIt is located at the rear of themachine.

10 It is linked with mainpower supply,ADP motor andelectronic cabinetIt ensures the pump automatic operation and controls allsensors and is linked to the display panel and emergency stop allows to exchange data with the control monitoring can be interfaced with the main panelIt ensures boxElectricalcabinetControl panelElectroniccabinetA 31 Monitoring for ADP 122 L pump2/2 alcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOE dition 01 - November 98 Monitoringcharacteristics Motor protection Pump temperature monitoring and control Maintenance time controlRemote controlconnectorMainsEmergencystop outputRoots motorADP motorSensorsPower boxElectricalcabinetControl panelElectroniccabinetA 40 Options1/3 alcatel Vacuum technology France - User s Manual ADP/ADS SERIESTWOE