氣體管路測試標準程序 - ct-tech.tw

1 MAIN GAS PIPING 1 : 2 : 3 4 a. a. ( ) a. ( ) 5kg/cm2 12 10kg/cm2 1 8kg/cm2 24 a. a. SNOOP a.

2 B. : 1 10kg/cm2 24 8kg/cm2 4/14 A 24 ( No Pressure Decrease ) SNOOP / 1. 2. Scope MAIN PIPING 3. Equipment : ANELVA :M-222LD-D LDL : 2 10-11 atm cc/s : Alcatel :ASM180TD+ LDL : 2 10-12 atm cc/s 4.

3 Definition VCR : Turbo Pump : 5. Flow sheet and process 1*10-9atm cc/sec 1*10-9atm cc/sec VCR VCR 1*10-9atm cc/sec ANELVA M-222LD-D 1*10-9 atm cc/sec

4 / Subject: 1. Purpose 2. Scope MAIN PIPING 3. Equipment : PMS : LPC-101-HP LDL : 4. Reference Particle Counter 5. Flow sheet and process 10pcs/ft3 (size m) PMS UlPC-101-HP PMS uLPC-101-HP a. m ( ) b. 0pcs/ft3 (size m) a.

5 B. c. 30 PMS LPC-101-HP HP a. b. c. 150sig( 11 / )2 d. e. 10pcs/ft3 (size m) f. NO 4 YES Subject: 1. Purpose 2. Scope MAIN PIPING 3. Equipment : DELTA-F : 550E LDL : ppb 4.

6 Reference 5. Flow sheet and process a. m 10ppb a. b. c. d. 3 Hrs a. 5 b. c. Purge ( 200 ppb ) a. 30 316 LEP 200ppb ( ) 10 60psig 2liters/min AC110V , 60Hz NO / YES Subject: 1.

7 Purpose 2. Scope MAIN PIPING 3. Equipment : MEECO TRACER 2 : LDL : ppb 4. Reference 5. Flow sheet and process a. TSMC14 m 10ppb a. b. Purge c. Purge 3 Hrs a. 5 b.

8 ( ) c. (200ppb) a. 316 LEP 200 ppb ( ) 60 psig AC110V 60Hz NO YES /