Transcription of 稲 秀樹、千徳 孝一 キヤノン ... - cybernet.co.jp
1 1. ITRS 99 DRAM 1/3 1/10 10nm DRAM 1 1 TTL m256 M 1 G 85 nm65 nm45 nm35 nmDRAM
2 Nm4 G 16 G ORA CCD CCD 1 100 Stepper Scanner TTL Offaxis Through The Lens TTL 550nm CCD TTL 100 100um TTL m Offaxis
3 TTL 2. CIS Chromatic Image Shift 2-1 D N SA Sin SA = D (1/N - tan N/ tan ) N =sin-1 ( sin N Snell SA SAD N CodeV RMS Root Mean Square S-BSL7 NA 2-1 D N ( AS CM Sin AS = D 2 N2-1)/N3CM = D (N2 1)/(2N3 CM AS VS.))
4 D (mm) RMS ( )NA = = = = VS. D (mm) (mm)NA = = = = CodeV ND Z9 D(mm) VS. Z9: CodeV Black Box mod NA CodeV CodeV > pma;zfr exp 36.
5 Go RMS Root Mean Square Fitting RMS CodeV >wav;rfo;go CodeV Text CodeV int enp input36 CodeV ade
6 Bug Local Minimum CodeV ( 3mm) 1 2 N1 N2 CIS CIS = D (tan 2-tan 1) cos 1 =sin-1 ( sin N1 2 =sin-1 ( sin N2 CIS CIS TTL CIS Offset CIS CIS nm ) CIS 2-3.)
7 CIS CIS CIS Chromatic Image Shift (Chromatic) ( Image) (Shift) CIS( Chromatic Image Shift) N N ( )DCIS 2 1 VS. Z5: = = = Deg. Zernike Z5 3mm VS. Z8: Zernike = = = = Deg. 3mm PPP4 PPP1 PPP2 PPP3 CIS CIS PPP1 ASPPP1 -( ASP ASPPP1)/2 PPP2 PPP2 CIS 3. TTL ASP CMP PPP1 -CMP PPP2 PPP3 PPP2 PPP3 PPP2 -( ASP ASPPP1)/2 PPP2 PPP3 -( ASP ASPPP1)
8 PPP1 ( ASP ASPPP1 PPP3 CIS PPP2 CIS PPP1 PPP2 PPP3 -ASP -CMP PPP1 PPP2 PPP3 FPA3000i5+ TTL PPP1 PPP2 PPP3 )
9 1 CIS Telecentricity Telecentricity LD LED 1 1.
10 Power 100 1 et al.,: 23 (1998)2 Warren : Modern Optical Engineering(McGraw-Hill,USA,1966) , et al., (1997), , P7512-7516
