Digital Mass Flow Controller - Flow and Pressure ...

1 Digital mass Flow Controller Digital /Analog model SEC-N102. Device Net model SEC-N104. PROFIBUS model DC24V drive, current or voltage control model SEC-N106. High accuracy High-speed response Flexible 1 second response at any setpoint Muti-gas,Multi-range Based on technologies developed in fields at the cutting edge, we offer various models that meet customer needs Gases are used for various pur purposes poses in wide iindustries: d i ranging i from f the h research h and d manufacture f of solar panels and fuel cells, the subjects of much attention as new sources of energy, to the research and manufacture of semiconductors, liquid crystal panels, and LEDs in the electronics industry. In this way gases support the development of society. HORIBASTEC leads the world in the development of advanced mass flow technology. Our products offer reliable, state of the art solutions for the semiconductor manufacturing and related industries.

2 HORIBA STEC offers a full lineup to meet your requirements. Select transmission mode Select power supply Models Digital communication RS485 F-NET Protocol 15 VDC SEC-N102 series HORIBA STEC'S lineup includes power supply Analog communication PE series. 0 5 VDC. SEC-N104 series Conforming to DeviceNet communication ODVA standards PROFIBUS communication SEC-N106 series Analog communication 24 VDC(13 to 32 VDC). 0 to 5 VDC, 0 to 10 VDC. 4 to 20mA. Model range covers flows up to 200slm (N2 equivalent). Flow rate range is controlled from 2% of full-scale flow rate. flow rate range (full-scale ). model 10 SCCM 10 SLM 20 SLM 50 SLM 100 SLM 200 SLM. SEC-N102 series SEC-N112 SEC-N122 SEC-N132 SEC-N142. SEC-N104 series SEC-N114 SEC-N124 SEC-N134 SEC-N144. SEC-N106 series SEC-N116 SEC-N126 SEC-N136 SEC-N146. 1. 100%. High accuracy 80%. Sensor output 60%. High accuracy 40%.

3 MFC' s linearity is compensated by polynomial approximated curve. This achieves high 20%. a c c u r a c y f o r a l l f l o w c o n t ro l r a n g e s . F o r t h e p u r p o s e o f a d v a n c e m e n t o f a c t u a l g a s 0 20% 40% 60% 80% 100%. accuracy, the calibration data of various process gases are measured by HORIBA STEC. Flow rate standard gas measurement system. : 30 100% Accuracy : 30% y=ax5+bx4+cx3+dx2+ex+f (SEC-N110/N120). Flow rate setting signal Flow rate Setting: 5V 100%. High-speed response throughout the flow rate range Flow rate Control signal Flow rate Setting: 80%. Flow rate Signal Flow rate Setting: 3V 60%. New variable PID algorithm: 1 second high-speed response Flow rate Setting: 40%. SEC-N100 series is installed with the latest Variable PID system , which can achieve 1V Flow rate Setting: 20%. 1 second response to all setting points.

4 Variable PID is continuously changing Flow rate Setting: 10%. depending on setting flow points, this allows the PID factor to be optimized when you 0 1sec 2sec 3sec change full scale flow and gas. Response speed Multi-gas, multi-range solution . Exclusive software allows the user to alter specification easily Exclusive software, Configuration software The latest multi-gas, multi-range system has made it possible SEC-N100 series offers multi-gas, multi-range functionality, thanks to for the user to change the type of gas or full-scale flow rate its configuration software. This software makes it possible to select freely. MR/MG numbers simply by entering the type of gas being used and the flow rate range, and also features a handy N 2 gas conversion MFC. MFC. MFC. Ar feature for flow rate measurements using N 2 gas during receipt MFC. MFC. CO CF4. inspections. To ensure that the software is used without error, SiH4 O2.

5 HORIBA STEC offers software operation seminars, MFC. MFC. please contact your HORIBA STEC representative. SiF4 PH3 N2. MFC. MFC. Easy spec change MFC. MFC. SF6 H2. MFC. at customer NF3 C2F6. C2H4. Suitable for multiple type of gas RS232C Cable Freely change type of gas Printer Example SEC-N100. MR MG-02 N2 100 SCCM Ar 110 SCCM. Serial LAN Cable RS485. Converter Conversion Adapter RS232C. CA-DP9RJ45. Suitable of multiple ranges PC (Windows). Cable Freely change the full-scale flow rate control range. Configuration Software Power supply Signal Cable SC-EDH. +15, -15 VDC. Example SEC-N100 N2 1000 SCCM N2 250 SCCM PE-S7. MR MG-04. Flow rate control range Flow rate control range 20 1000 SCCM 5 250 SCCM. SEC-N100. 2. Product specifications Common specifications SEC-N112 MGM SEC-N112 MGR SEC-N122 MGM SEC-N122 MGR SEC-N132 MGM SEC-N132 MGR SEC-N142 MGM SEC-N142 MGR. mass Flow Controller model SEC-N114 MGM SEC-N114 MGR SEC-N124 MGM SEC-N124 MGR SEC-N134 MGM SEC-N134 MGR SEC-N144 MGM SEC-N144 MGR.

6 SEC-N116 MGM SEC-N116 MGR SEC-N126 MGM SEC-N126 MGR SEC-N136 MGM SEC-N136 MGR SEC-N146 MGM SEC-N146 MGR. SEF-N112 MGM SEF-N112 MGR SEF-N122 MGM SEF-N122 MGR SEF-N132 MGM SEF-N132 MGR SEF-N142 MGM SEF-N142 MGR. mass Flow meter model SEF-N114 MGM SEF-N114 MGR SEF-N124 MGM SEF-N124 MGR SEF-N134 MGM SEF-N134 MGR SEF-N144 MGM SEF-N144 MGR. SEF-N116 MGM SEF-N116 MGR SEF-N126 MGM SEF-N126 MGR SEF-N136 MGM SEF-N136 MGR SEF-N146 MGM SEF-N146 MGR. R01 : 10 SCCM. : 01 : 30 SCCM. : 55 SCCM. 02 : 100 SCCM. : 175 SCCM : 22 SLM. Full-scale flow rate (N2 conversion flow rate) 03 : 300 SCCM 07 : 30 SLM 09: 100 SLM 10 : 200 SLM. : 550 SCCM. 08 : 50 SLM. 04 : 1 SLM. : 05 : 3 SLM. : 06 : 10 SLM. Valve type C: Normally closed C: Normally closed / O: Normally open Flow rate at fully closed control valve 2% Flow rate control range 2-100% of Flow rate measuring range (SEF) 0-100% of Accuracy *1 (Flow rate > 30% ) (Flow rate > 35% ).

7 (Flow rate 30% ) (Flow rate 35% ). Operating temperature 5 to 50 C (recommended temperature range: 15 to 45 C ). Response 1 second: Over full flow rate range Linearity Repeatability 50 to 300kPa (d). Operating differential Pressure 200 to 300kPa (d) 100 to 300kPa (d) 200 to 300kPa (d). MR. , 06:100 to 300kPa (d). Operating differential Pressure (SEF) 300kPa (d). Pressure 450kPa (d). Pressure resistance 1000kPa (d). Leak integrity *2 5x10-12Pa m3/s . 1x10-10Pa m3/s 5x10-12Pa m3/s 1x10-10Pa m3/s . 5x10-12Pa m3/s . 1x10-10Pa m3/s 5x10-12Pa m3/s . 1x10-10Pa m3/s . (He) (He) (He) (He) (He) (He) (He) (He). SUS316L SUS316L SUS316L SUS316L. Wetted materials PTFE PTFE PTFE PTFE SUS316L SUS316L SUS316L SUS316L. magnetic stainless magnetic stainless magnetic stainless magnetic stainless Viton Viton . Viton Viton . Standard fitting 1/4 inch VCR equivalent 1/2 VCR equivalent Mounting orientation Free *1 Guarantee temperature of flow rate accuracy is based on SEMI standards E56-1296.

8 This is accuracy for full-scale point of MR,MG number. *2 Per SEMI standards E16-90. * SCCM, SLM are numbers that represents flow rate (mL/min, L/min, at 0 kPa). Communication/power supply Digital /Analog communication model SEC-N102 series mass Flow Controller model SEC-N112 MGM SEC-N112 MGR SEC-N122 MGM SEC-N122 MGR SEC-N132 MGM SEC-N132 MGR SEC-N142 MGM SEC-N142 MGR. mass Flow meter model SEF-N112 MGM SEF-N112 MGR SEF-N122 MGM SEF-N122 MGR SEF-N132 MGM SEF-N132 MGR SEF-N142 MGM SEF-N142 MGR. Flow rate setting signal to 5 VDC (2% to ); Input impedance 1M or higher Flow rate output signal 0 to 5 VDC (0% to ); Minimum load resistance 2k . Digital interface With address function: RS-485 (transmission speed 38400bps) F-NET Protocol +15V 5% 150mA +15V 5% 150mA +15V 5% 150mA. Power supply -15V 5% 200mA -15V 5% 250mA -15V 5% 150mA. DeviceNet communication model SEC-N104 series mass Flow Controller model SEC-N114 MGM SEC-N114 MGR SEC-N124 MGM SEC-N124 MGR SEC-N134 MGM SEC-N134 MGR SEC-N144 MGM SEC-N144 MGR.

9 mass Flow meter model SEF-N114 MGM SEF-N114 MGR SEF-N124 MGM SEF-N124 MGR SEF-N134 MGM SEF-N134 MGR SEF-N144 MGM SEF-N144 MGR. Digital interface DeviceNet Protocol Power supply Comforming to ODVA standards, DC24V Comforming to ODVA standards, DC24V PROFIBUS communication/Analog communication SEC-N106 series mass Flow Controller model SEC-N116 MGM SEC-N116 MGR SEC-N126 MGM SEC-N126 MGR SEC-N136 MGM SEC-N136 MGR SEC-N146 MGM SEC-N146 MGR. mass Flow meter model SEF-N116 MGM SEF-N116 MGR SEF-N126 MGM SEF-N126 MGR SEF-N136 MGM SEF-N136 MGR SEF-N146 MGM SEF-N146 MGR. Flow rate setting signal to 5 to 10 to 20mA (2% to ). Flow rate output signal 0 to 5 VDC/0 to 10 VDC/4 to 20mA (0% to ). Digital interface PROFIBUS-DP Protocol Power supply 24 VDC (13 to 32 VDC) 24 VDC (13 to 32 VDC) 3. Selecting a model model specification SEC-N1 1 2 MG M C T 1 1 SLM 4CR L N2. SEC-N1 3 4 MG R O S 1 3 100 SLM 8CR G Ar A B C D E F G H I J K L M.

10 A. 1 Model H PROFIBUS communication: voltage/current select (compatible with SEC-N106). SEC-N1: mass flow Controller Blank : not a PROFIBUS communication SEF-N1: mass flow meter 1 : setting/output signal 0~5 VDC. 2 : setting/output signal 0~10 VDC. B Full-scale flow rate 3 : setting/output signal 4~20mA. 1: 10 SLM (N2 equivalent flow rate). 2: 50 SLM (N2 equivalent flow rate) I Multi-range, multi-gas (MR, MG) numbers 3: 100 SLM (N2 equivalent flow rate) Please specify MR, MG numbers. 4: 200 SLM (N2 equivalent flow rate) For details, please see the specifications below. C Transmission mode J Full-scale flow rate 2: Digital communication (RS-485/F-net Protocol), Please specify full-scale flow rate. Analog communication (voltage signal). 4: DeviceNet K Joint 6: PROFIBUS communication , Analog communication 4CR: 1/4 VCR male type fitting (voltage signal/current signal) (applicable with SEC-N110 and SEC-N120).