Digital Mass Flow Controllers - Techno Fittings

1 Gas supply systems require devices that are ultra-clean, compact, and support greater circuit integration, and lately there is increasing demand for devices that offer highly intelligent functioning in more intelligent gas supply systems as well. mass flow Controllers are commonly considered the core of gas supply systems, and the advance of Digital mass flow Controllers with CPUs is the focus of a great deal of STEC succeeded in developing the world s first mass -produced Digital mass flow controller in 1990. Since then, Digital mass flow Controllers have come to be regarded as high-end products.

2 HORIBA STEC has consistently pursued the advance of Digital mass flow Controllers through the development of new functions and the improvement of existing functions, including the creation of higher performance CPUs, the addition of DeviceNet communications compatibility, and the expansion of software capabilities to push mass flow controller performance to its mass Flow ControllersGAS05 Multi Range Multi Gas Digital mass flow controllersDeviceNet compatible Digital mass flow controllersSEC-Z500 seriesSEC-Z10D/Z10DW seriesDigital mass flow controllersSEC-F700 seriesDigital mass flow controllersSEC-V100D seriesCutting edge models with DeviceNet or Digital communicationssAdvanced High reliability 32bit CPU FS (standard gas) is covered by and FS flow specification are available to change easily by user.

3 (MRMG function)sHigh precision. (Set point accuracy)sFast Response across the whole flow range. (Variable PID function)sAnalog/ Digital (RS485) control mode or DeviceNet Interface available.(Passed the ODVA (DeviceNet Association) SEMI SIG conformance test.)sCompact SEC-Z512: Compatible with inch pitch gas panel. SEC-Z512/522: 106mm between VCR surface (Compatible with inch gas panel.)Cutting edge models with DeviceNet communicationssCompatible with the DeviceNet interface: Passed the ODVA (DeviceNet Association) SEMI SIG conformance scale 5 SCCM to 100 SLM flow rate response in the control flow rate clean models featuring piezo : Compatible with inch pitch gas panelsSEC-Z10DW/Z12DW: 106 mm between VCR type surfaces (Compatible with inch pitch gas panels)The pioneer series of Digital mass flow controllerssHigh precision: By using a Digital linearizer (polynomial calibration curve).

4 Up to five calibration can be stored curve response: Have Digital PID for fast response in a low flow rate variety of alarms alert the operator to changes in the gas quickly, averting alarm functions: The mass flow controller determines if there are changes in the control conditions and outputs an clean models featuring piezo : 106 mm between surfaces, suitable for integrated gas precision models offering set point precisionsHigh precision: Set point (30 to 100% )sFast response: Quick start function and response times of under a lineup of models that are not affected by orientation: A MF (mount-free) sensor that prevents thermal siphoning through its construction (MF models option).

5 SCompletely interchangeable with analog mass flow : 106 mm between surfaces, suitable for integrated gas mass Flow Controllers0680%60%40%25%100%M: type, SUS316 LOpen at power-off: O Close at power-off: C3/5/10 SLM2 to 100% than 1 sec (T98)20 to 100% to 20% kPa (G)1 MPa (G)5 x 10-12 Pa m3/s (He)5 to 50 C (accuracy guaranteed between 15 and 35 C) Digital : RS-422A (F-Net protocol)Analog: to 5 VDC (Input impedance : more then 1M ) Digital : RS-422A (F-Net protocol)Analog: 0 to 5 VDC (Minimun load resistance 2k )+15 VDC 5%, 140 mA-15 VDC 5%, 120 mA, VA1/4 VCR type or IGS5/10/20/30/50/100200/300/500 SCCM1/2 SLM5 SCCM to 5 SLM: 50 to 300 kPa (d)10 SLM: 100 to 300 kPa (d)20/30 SLM20 SLM: 100 to 300 kPa (d)30 SLM.

6 100 to 300 kPa (d)Materials used in gas contact areaValve typeStandard flow rate range (N2 equivalent )Flow rate control rangeResponse speedAccuracyLinearityRepeatabilityOpera ting differential pressureMaximum operating pressurePressure ResistanceLeak IntegrityOperating temperatureFlow rate setting signalFlow rate output signalDrive power sourceStandard FittingF730F740F750 SEC-Model*SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0 C, kPa).SEC-F700 seriesM: type, SUS316L, internal surface polishing standard 1% MPa (G)less than 5 x 10-12 Pa m3/s (He)5 to 50 C (accuracy guaranteed between 15 and 45 C)Conforms to ODVA standard (rated value 24 VDC (11 to 25 VDC)) VATop or sides1/4 VCR type or IGS2 to 100% kPa (G)Top or sides1/4 VCR type or IGS100 SLM (H2, H2)5 to 100% than 1 sec (T98)N2: 350 to 400 kPa (d)H2: 250 to 300 kPa (d)N2: 400 kPa (G)H2: 300 kPa (G)To p3/8 VCR type or IGSOpen at power-off: OClosed at power-off.

7 C5/10/20/30/50/100200/300/500 SCCM1/2/3/5 SLM50 to 300 kPa (d)5/10/20/30/50/100200/300/500 SCCM1/2/3/5 SLM150 to 300 kPa (d)10 SLM100 to 300 kPa (d)10 SLM200 to 300 kPa (d)20/30 SLM150 to 300 kPa (d)50 SLM200 to 300 kPa (d)20/30 SLM20 SLM: 150 to 300 kPa (d)30 SLM: 200 to 300 kPa (d)Closed at power-off: C100 SLM(H2 200 SLM: Option)Less than sec (T98)100 SLM: 150 to 300 kPa (d)H2 200 SLM: 200 to 300 kPa (d)To p3/8 VCR typeOpen at power-off: O Close at power-off: C2 to 100% kPa (G)Materials used in gas contact areaValve typeStandard flow rate range (N2 equivalent )Flow rate control rangeResponse speedAccuracyLinearityRepeatabilityOpera ting differential pressureMaximum operating pressurePressure ResistanceLeak IntegrityOperating temperatureDrive power sourceConnector positionStandard FittingZ10 DSEC-Z12DZ13DZ11 DWZ12 DWZ13 DWModel*SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0 C, kPa).

8 SEC-Z10D/Z10DW seriesM: type, SUS316L, internal surface polishing standardOpen at power-off: O Close at power-off: C2 to 100% than 1 sec across the entire flow rate control range (T98) (30 to 100% ) (2 to 25% )(Description in accordance with SEMI STANDARD E56-1296) kPa (G)1 MPa(G)less than 5 x 10-12 Pa m3/s (He)5 to 50 CDigital: RS-485 (F-Net protocol)DeviceNet : (SEC-Z514MG/Z524MG)Analog: to 5 VDC (Input impedance : more then 1M ) Digital : RS-485 (F-Net protocol)DeviceNet : (SEC-Z514MG/Z524MG)Analog: 0 to 5 VDC (Minimun load resistance 2k )+15V 5% 150mA -15V 5% 150mA DeviceNet : Conforms to ODVA standard (rated value 24 VDC (11 to25 VDC) "VCR Type or IGS#01: 30/# : 55/#02: 100/# : 175/#03: 300/# : 550 SCCM#04: 1/# : #05: 3/# : #06: 10 SLM50 to 300kPa (d) [ to (d)](# and #06 100 to 300kPa(d)#07: 30/#08: 50 SLM*Available for N2,H2,Ar,O2 Please contact us if you need another gases others#07: 200 to 300kPa(d)#08: 200(valve C)/250(valve O) to 300kPa(d)Z512MG (DeviceNet model: Z514MG)SEC-Z522MG (DeviceNet model.)))

9 Z524MG)*SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0 C, kPa).SEC-Z500 seriesMaterials used in gas contact areaValve TypeStandard Flow Range (N2 Equivalent )Flow Rate Control RangeResponse speedAccuracyLinearityRepeatabilityOpera ting differential pressureMaximum operating pressurePressure Resistance Leak IntegrityOperating TemperatureFlow rate setting signalFlow rate output signalDrive Power SourceStandard FittingModelGAS07 SEC-Z500 seriesAccuracy : 25 100% : <25% 0-2% responseMFC SETMFC OUTMFC SETMFC OUTB efore changed full scaleAfter changed full scale to 25%1sec1secLinearity is compensated by polynomial approximated carve80%60%40%25%80%60%40%25%051015-5-10 -15 Accuracy (% ) Accuracy 1% Accuracyy=ax5+bx4+cx3+dx2+ex+fFlow%60%12 34580%100%Sensor output (V)100%100%MFC's linearity is compensated by polynomial approximated curve.

10 This achieves high accuracy for all flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration data of various process gases are measured by HORIBA STEC standard gas measurement system. sHigh AccuracySEC-Z500 is installed with a newly developed "Variable PID system", which can achieve 1 second response to all setting points. Variable PID is continuously changing depending on setting flow points. This allows the PID factor to be optimized when you changed full scale flow and Speed Response SEC-Z500 series Gases and Full Scale Range can be changed by the customer using our exclusive software.