DLC膜の特性とその応用 - ntn.co.jp

1 NTN TECHNICAL REVIEW 2009 . [ ]. DLC . Characteristics and Applications of DLC films * Kouya OOHIRA.. DLC .. DLC . DLC . DLC . From the view point of environment and energy issues, vigorous efforts have been put into research and development activities for tribological coating films in order to reduce friction and wear of sliding surfaces. In particular, DLC (Diamond-Like Carbon) coatings have superior low-friction and anti-wear properties compared with other coating films, and they are attracting a lot of attention of tribology researchers and engineers. Friction and wear properties of DLC films, however, depend on their use conditions as well as their production process, and thereby it is necessary to choose an appropriate DLC films according to its use condition and engineering purpose. This article shows various properties of DLC films. 1.. NTN DLC a-C:H Hydro- genated amorphous carbon .. 1, 2.

2 DLC ta-C Tetrahedral amorphous Mo carbon . 3 . DLC .. DLC . DLC .. Diamond Like Carbon DLC .. * . -87- NTN TECHNICAL REVIEW 2009 . ta-C . 2. DLC a-C . a-C:H . ta-C:H ta-C 3 sp DLC . DLC sp 3 ta-C. 1 ta-C:H. sp2 2 . a-C:H. 3 DLC .. a-C. Ferrai Robertson4) 4 .. 3 .. sp2 H. 4 . Classification of amorphous carbon DLC . 1 DLC .. DLC . sp3 sp2 . DLC . 1 sp3 5, 6, 7) . Structure of diamond 1 . Comparison of characteristics of carbon material DLC.. cm 10-3 1012 1016 109 14.. W/cm/K 1000 2000 30. a= a= .. nm . c= .. GPa 1000 2000 100 800. Hv 10000 12000 1000 8000. 2 sp2 400 450 600 300 500. Structure of graphite sp2. sp3. 3 DLC sp3 sp2 . Structure of DLC films -88- DLC . 2. 2 DLC 2 DLC . Characteristics of various DLC films DLC . PVD CVD .. UBMS AIP CVD . DLC .. C 250 300 200. Hv 2000 5000 5000 8000 1000 2000. 1 PVD Physical Vapor Deposition .. 2 CVD Chemical Vapor Deposition .. PVD .. CVD DLC 8 . 15 50atm% AIP.

3 PVD CVD . DLC . 5 . DLC 2 .. DLC 5 . 5, 6, 7 CVD . 2 UBMS .. CVD .. 2. 3 DLC .. 2. 3. 1 . PVD DLC 3 DLC .. DLC .. CVD .. CVD CVD . CVD 2. 3. 2 . UBMS . 5 . Classification of coating methods DLC . -89- NTN TECHNICAL REVIEW 2009 . 3 DLC . Characteristics of DLC films and other hard coating films Hv . DLC 1000 8000 . TiN 2000 2400 . ZrN 2000 2200 . CrN 2000 2200 . TiC 3200 3800 . TiCN 3000 3500 . TialN 2300 2500 . NTN .. 6 . 4 .. 6 NTN . Wear test rig 7 . DLC 4 . Test conditions TiN 1/6 . SUS440C 48mm 7mm . mRa DLC SUJ2 R60mm Hv784.. mRa DLC . 50N .. m/s 3 min 9m . 0 20 RH. 40000 1. 10-10mm3/(N m). 32000.. 24000 16000 8000 0 0. DLC TiN TiSiAlN TiCN TiAlN CrN CrAlN CrSiN. 7 . Wear property and coefficient of friction of each specimen specimens -90- DLC . 3. DLC . 3. 1 . UBMS AIP . CVD 3 DLC NTN.. 8 5 . 9 DLC A . 30 Indentation of DLC film (A). 3 DLC UBMS . DLC A . AIP DLC B .. 500 10-10mm3/(N m).. 400 10 DLC B.

4 300 Indentation of DLC film (B). 200 100 0 0. A UBMS B AIP C CVD). 8 . Wear property and coefficient of friction of each specimen 0. 5 DLC . Coating method, hardness, thickness of DLC films 11 DLC C . Indentation of DLC film (C). GPa m A UBMS 26 B AIP 53 DLC C . C CVD 15 DLC .. 3. 2 . DLC 1 UP .. 2 . (1470N) 3 DLC .. DLC . 9 11 . DLC A DLC . DLC B .. -91- NTN TECHNICAL REVIEW 2009 . 1/20 . 4.. DLC . WC Cu .. DLC .. DLC . DLC .. DLC . NTN . 6 . DLC UBMS Test conditions 6 12 WC-Co 48mm 7mm . 13 14 15 mRa Cu58% Fe40% .. mRa 50N. m/s m 30 min 180m . 0 20 RH. DLC m . 12 13 DLC . Wear of sliding part (WC) Wear of sliding part (WC + DLC film ). 14 15 DLC . Surface profile of wear (WC) Surface profile of wear (WC + DLC films). -92- DLC . 5.. DLC .. DLC .. 1 et al., SAE Paper, 2000-01-0518. 2 et al., Wear, 254(2003), 1070-1075. 3 et al. : Proceedings of The Third Asia International Conference on Tribology, October 2006, Kanazawa, 399.

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