FITTINGSTUBE High-Flow, Manual Gas Pressure Regulators

1 High-Flow, Manual Gas Pressure Regulators HF Series 1. FITTINGS. TUBE. H ig h- F low, M an u al PIPE, WELD, VCR, VCO. FITTINGS. Ga s P res s u re Regulato rs STANDARD. TUBING. FLEXIBLE. TUBING. HOSE /. BALL & PLUG. valves . DIAPHRAGM. BELLOWS, valves . CHECK & relief . valves . METERING. NEEDLE &. valves . INSTRUMENT. MANIFOLD. SYSTEMS. MODULAR. SYSTEMD. Manual GAS. Regulators . HF Series Compact size with flow rates up to 200 std L/min MEASUREMENT. DEVICES. Maximum inlet pressures up to 500 psig ( bar). Manually adjustable outlet Pressure up to 150 psig ( bar). 316L VIM-VAR stainless steel body for ultrahigh-purity applications MEDIUM- HIGH- Pressure .

2 1/4 in. VCR metal face seal; 1/4 in. tube butt weld; in. and in. modular surface-mount end connections REFERENCES. 2 Pressure Regulators and Filters Features FITTINGS. TUBE. The Swagelok HF series Manual gas Pressure regulator features a load spring which interacts with a unique Pressure -sensing assembly to precisely PIPE, WELD, control outlet Pressure . Outlet Pressure VCR, VCO. FITTINGS. is easily adjusted by turning the handle. Compact, high-flow design allows close spacing of system components and process lines. STANDARD. TUBING. Innovative, Pressure -sensing assembly with welded diaphragm results in low droop, which eliminates the need for adjustment in many systems.

3 FLEXIBLE. High-purity design features tied TUBING. HOSE /. poppet for positive shutoff and metal-to-metal seal to atmosphere and 316L VIM-VAR stainless steel body internally electropolished and BALL & PLUG. in. Modular in. Modular Inline Model with valves . finished to 5 in. ( m) Ra. Surface-Mount Surface-Mount Tube Butt Weld Model Model End Connections Inline and in. Modular Surface-Mount Models in. Modular Surface-Mount Model DIAPHRAGM. BELLOWS, valves . Provide flow rates up to 200 std L/min Is designed for in. C-seal and W-seal integrated gas Are available in outlet pressures ranging from vacuum to systems 150 psig ( bar) with four interchangeable, color-coded Provide flow rates up to 160 std L/min CHECK & relief .

4 Load springs Is available in two ranges: vacuum to 30 psig ( bar). valves . Modular surface-mount regulator with is IGC compatible. and vacuum to 60 psig ( bar). Self-Centering Poppet Pressure -Sensing Assembly Minimizes creep Provides excellent lockup performance with METERING. NEEDLE &. perfluoroelastomer poppet. valves . Is offered in PCTFE for leak-tight shutoff. Narrow-Profile Handle Adjustable Outlet Pressure Permits easy access for Pressure adjustments when Is achieved by fine handle adjustment. system components and process lines are closely spaced Optional tamper-resistant handle allows user to set and INSTRUMENT.

5 MANIFOLD. SYSTEMS. Features both a finger-tip grip and knurled diameter for seal outlet Pressure . positive actuation. MODULAR. SYSTEMD. Technical Data Supply- Pressure Rating Temperature Rating Pressure Flow Flow Internal Manual GAS. Regulators . psig (bar) F ( C) Effect Coefficient Rate Orifice Volume Model Inlet Outlet Operating Bakeout (SPE) (Cv) std L/min in. (mm) (cm3). Inline and ( ) with vacuum to vacuum to 10 to 150 302 in. modular 200 VCR end 500 ( ) 150 ( ) ( 23 to 65) (150) ( ). surface mount connections MEASUREMENT. DEVICES. in. vacuum to vacuum to 32 to 302 32 to 302 modular surface 160 ( ). 150 ( ) 60 ( ) (0 to 150) (0 to 150) ( ).

6 Mount The ratio of the change in outlet Pressure for every 100 psi change in the inlet Pressure . With inlet Pressure at 100 psig ( bar) and outlet Pressure at 30 psig ( bar). MEDIUM- HIGH- Pressure . REFERENCES. High-Flow, Manual Gas Pressure Regulators HF Series 3. Process Specifications FITTINGS. TUBE. Refer to Swagelok specifications Special Cleaning and Packaging (SC-11) catalog, MS 06 63, and Ultrahigh-Purity Process Specification (SC 01) catalog , MS 06 61, for details on processes, process controls, and process verification. Assembly and Process Process Wetted Surface PIPE, WELD, Cleaning Packaging Designator Specification Roughness (Ra) Testing VCR, VCO.

7 FITTINGS. Ultrahigh-purity cleaning with Performed in ISO Class 4 Ultrahigh- a continuously monitored, work areas; Regulators are Purity Process P 5 in. ( m). deionized water, ultrasonic double bagged and vacuum Specification Inboard helium leak cleaning system sealed in cleanroom bags (SC 01) average, machine tested to a rate of finished and Special cleaning with Performed in specially Special Cleaning 1 10 9 std cm3/s STANDARD. electropolished TUBING. non ozone-depleting cleaned areas; Regulators are P1 and Packaging chemicals individually bagged (SC 11). Materials of Construction FLEXIBLE. TUBING. HOSE /. Inline and 1.

8 Inline and in. Modular in. Modular in. Modular Surface-Mount Models Surface-Mount Model Surface-Mount Component Material Grade / ASTM Specification BALL & PLUG. Models valves . 1 Label Polypropylene Aluminum (not shown) (tamper-resistant handle). 2. 2 Standard handle Blue nylon Aluminum 6061-T6 / B211. 3 Optional handle Aluminum 6061-T6 / B211 . DIAPHRAGM. BELLOWS, 4 Set screw Alloy steel / ANSI valves .. (not shown) (tamper-resistant handle). 3 Load disk S17400 SS / A564 Polyetherimide / D5205. 4 Load spring S17700 SS / A313. CHECK & relief . 5 5 Bonnet nut Silver-plated 316 SS / A479. valves . 6 Balance spring S17700 SS / A313.

9 10 6. 7 Damper shaft 316 SS / A479 . 11 7 8 O-ring Fluorocarbon FKM. 13 8 9 O-ring catch Brass 360 / B16 . METERING. NEEDLE &. valves . 10 Bonnet S17400 SS / A564. 14 9. 11 Backup ring Brass 360 / B16 . 16. 15 12 Return disk Polyetherimide / D5205. 17. 13 Diaphragm Alloy 625 / AMS 5879. INSTRUMENT. MANIFOLD. SYSTEMS. 22 316L SS VIM-VAR /. 14 Face plate SEMI F20 . Ultrahigh-Purity . 15 Poppet-retaining 19 wafer Alloy X-750 /B637 . 21 20. MODULAR. SYSTEMD. 16 Stem 316L SS / A479. 17 Poppet PCTFE / AMS 3650 Perfluoroelastomer FFKM. in. Modular 1. 18 Poppet core 316L SS / A479. Surface-Mount Model 2 19 Poppet port seal Alloy C-276 / B574.

10 Manual GAS. 3 20 Poppet port plug 316 SS / A479 Regulators . 316L SS VIM-VAR /. 21 Body 4 SEMI F20 Ultrahigh-Purity . 316L SS VIM-VAR /. 22 Welded end MEASUREMENT. 12 5 connections SEMI F20 . DEVICES. Ultrahigh-Purity . 8. 6 Wetted components listed in italics. 10. 20 % minimum elongation allowed. 13. 16. MEDIUM- HIGH- Pressure . 17. 21. 18. REFERENCES. 4 Pressure Regulators and Filters Operating Performance FITTINGS. TUBE. Inline and in. Modular Surface-Mount Models in. Modular Surface-Mount Model Load Spring Range at Average Lockup Pressure Maximum Inlet and Outlet Pressures Example: For a flow rate of 200 std cm3/min, after PIPE, WELD, VCR, VCO.