FITTINGSTUBE High-Flow, Manual Gas Pressure Regulators

1 High-Flow, Manual Gas Pressure Regulators HF Series 1. FITTINGS. TUBE. H ig h- F low, M an u al PIPE, WELD, VCR, VCO. FITTINGS. Ga s P res s u re Regulato rs STANDARD. TUBING. FLEXIBLE. TUBING. HOSE /. BALL & PLUG. VALVES. DIAPHRAGM. BELLOWS, VALVES. CHECK & RELIEF. VALVES. METERING. NEEDLE &. VALVES. INSTRUMENT. MANIFOLD. SYSTEMS. MODULAR. SYSTEMD. Manual GAS. Regulators . HF Series Compact size with flow rates up to 200 std L/min MEASUREMENT. DEVICES. Maximum inlet pressures up to 500 psig ( bar). Manually adjustable outlet Pressure up to 150 psig ( bar). 316L VIM-VAR stainless steel body for ultrahigh-purity applications MEDIUM- HIGH- Pressure . 1/4 in. VCR metal face seal; 1/4 in. tube butt weld; in. and in.

2 Modular surface-mount end connections REFERENCES. 2 Pressure Regulators and Filters Features FITTINGS. TUBE. The Swagelok HF series Manual gas Pressure regulator features a load spring which interacts with a unique Pressure -sensing assembly to precisely PIPE, WELD, control outlet Pressure . Outlet Pressure VCR, VCO. FITTINGS. is easily adjusted by turning the handle. Compact, high-flow design allows close spacing of system components and process lines. STANDARD. TUBING. Innovative, Pressure -sensing assembly with welded diaphragm results in low droop, which eliminates the need for adjustment in many systems. FLEXIBLE. High-purity design features tied TUBING. HOSE /. poppet for positive shutoff and metal-to-metal seal to atmosphere and 316L VIM-VAR stainless steel body internally electropolished and BALL & PLUG.

3 In. Modular in. Modular Inline Model with VALVES. finished to 5 in. ( m) Ra. Surface-Mount Surface-Mount Tube Butt Weld Model Model End Connections Inline and in. Modular Surface-Mount Models in. Modular Surface-Mount Model DIAPHRAGM. BELLOWS, VALVES. Provide flow rates up to 200 std L/min Is designed for in. C-seal and W-seal integrated gas Are available in outlet pressures ranging from vacuum to systems 150 psig ( bar) with four interchangeable, color-coded Provide flow rates up to 160 std L/min CHECK & RELIEF. load springs Is available in two ranges: vacuum to 30 psig ( bar). VALVES. Modular surface-mount regulator with is IGC compatible. and vacuum to 60 psig ( bar). Self-Centering Poppet Pressure -Sensing Assembly Minimizes creep Provides excellent lockup performance with METERING.

4 NEEDLE &. perfluoroelastomer poppet. VALVES. Is offered in PCTFE for leak-tight shutoff. Narrow-Profile Handle Adjustable Outlet Pressure Permits easy access for Pressure adjustments when Is achieved by fine handle adjustment. system components and process lines are closely spaced Optional tamper-resistant handle allows user to set and INSTRUMENT. MANIFOLD. SYSTEMS. Features both a finger-tip grip and knurled diameter for seal outlet Pressure . positive actuation. MODULAR. SYSTEMD. Technical Data Supply- Pressure Rating Temperature Rating Pressure Flow Flow Internal Manual GAS. Regulators . psig (bar) F ( C) Effect Coefficient Rate Orifice Volume Model Inlet Outlet Operating Bakeout (SPE) (Cv) std L/min in. (mm) (cm3).

5 Inline and ( ) with Vacuum to Vacuum to 10 to 150 302 in. modular 200 VCR end 500 ( ) 150 ( ) ( 23 to 65) (150) ( ). surface mount connections MEASUREMENT. DEVICES. in. Vacuum to Vacuum to 32 to 302 32 to 302 modular surface 160 ( ). 150 ( ) 60 ( ) (0 to 150) (0 to 150) ( ). mount The ratio of the change in outlet Pressure for every 100 psi change in the inlet Pressure . With inlet Pressure at 100 psig ( bar) and outlet Pressure at 30 psig ( bar). MEDIUM- HIGH- Pressure . REFERENCES. High-Flow, Manual Gas Pressure Regulators HF Series 3. Process Specifications FITTINGS. TUBE. Refer to Swagelok specifications Special Cleaning and Packaging (SC-11) catalog, MS 06 63, and Ultrahigh-Purity Process Specification (SC 01) catalog , MS 06 61, for details on processes, process controls, and process verification.

6 Assembly and Process Process Wetted Surface PIPE, WELD, Cleaning Packaging Designator Specification Roughness (Ra) Testing VCR, VCO. FITTINGS. Ultrahigh-purity cleaning with Performed in ISO Class 4 Ultrahigh- a continuously monitored, work areas; Regulators are Purity Process P 5 in. ( m). deionized water, ultrasonic double bagged and vacuum Specification Inboard helium leak cleaning system sealed in cleanroom bags (SC 01) average, machine tested to a rate of finished and Special cleaning with Performed in specially Special Cleaning 1 10 9 std cm3/s STANDARD. electropolished TUBING. non ozone-depleting cleaned areas; Regulators are P1 and Packaging chemicals individually bagged (SC 11). Materials of Construction FLEXIBLE.

7 TUBING. HOSE /. Inline and 1. Inline and in. Modular in. Modular in. Modular Surface-Mount Models Surface-Mount Model Surface-Mount Component Material Grade / ASTM Specification BALL & PLUG. Models VALVES. 1 Label Polypropylene Aluminum (not shown) (tamper-resistant handle). 2. 2 Standard handle Blue nylon Aluminum 6061-T6 / B211. 3 Optional handle Aluminum 6061-T6 / B211 . DIAPHRAGM. BELLOWS, 4 Set screw Alloy steel / ANSI VALVES.. (not shown) (tamper-resistant handle). 3 Load disk S17400 SS / A564 Polyetherimide / D5205. 4 Load spring S17700 SS / A313. CHECK & RELIEF. 5 5 Bonnet nut Silver-plated 316 SS / A479. VALVES. 6 Balance spring S17700 SS / A313. 10 6. 7 Damper shaft 316 SS / A479 . 11 7 8 O-ring Fluorocarbon FKM.

8 13 8 9 O-ring catch Brass 360 / B16 . METERING. NEEDLE &. VALVES. 10 Bonnet S17400 SS / A564. 14 9. 11 Backup ring Brass 360 / B16 . 16. 15 12 Return disk Polyetherimide / D5205. 17. 13 Diaphragm Alloy 625 / AMS 5879. INSTRUMENT. MANIFOLD. SYSTEMS. 22 316L SS VIM-VAR /. 14 Face plate SEMI F20 . Ultrahigh-Purity . 15 Poppet-retaining 19 wafer Alloy X-750 /B637 . 21 20. MODULAR. SYSTEMD. 16 Stem 316L SS / A479. 17 Poppet PCTFE / AMS 3650 Perfluoroelastomer FFKM. in. Modular 1. 18 Poppet core 316L SS / A479. Surface-Mount Model 2 19 Poppet port seal Alloy C-276 / B574 . Manual GAS. 3 20 Poppet port plug 316 SS / A479 Regulators . 316L SS VIM-VAR /. 21 Body 4 SEMI F20 Ultrahigh-Purity . 316L SS VIM-VAR /. 22 Welded end MEASUREMENT.

9 12 5 connections SEMI F20 . DEVICES. Ultrahigh-Purity . 8. 6 Wetted components listed in italics. 10. 20 % minimum elongation allowed. 13. 16. MEDIUM- HIGH- Pressure . 17. 21. 18. REFERENCES. 4 Pressure Regulators and Filters Operating Performance FITTINGS. TUBE. Inline and in. Modular Surface-Mount Models in. Modular Surface-Mount Model Load Spring Range at Average Lockup Pressure Maximum Inlet and Outlet Pressures Example: For a flow rate of 200 std cm3/min, after PIPE, WELD, VCR, VCO. FITTINGS. The operating range for each load spring includes the area downstream flow is shut off, the change in outlet Pressure below each line. is approximately psi ( bar). Inlet Pressure , bar 2,20. STANDARD. TUBING. 500 std cm3/min 2,18.

10 Outlet Pressure , psig Outlet Pressure , bar 2,16. Outlet Pressure , psig psi Outlet Pressure , bar 200 std cm3/min ( bar) 2,14. FLEXIBLE. TUBING. HOSE /. 2,12. 10 std cm3/min 2,10. 2,08. BALL & PLUG. 2,06. VALVES. 0 4 10 20 30 40 50 60 0. Time, seconds Downstream shutoff point Inlet Pressure , psig USA. DIAPHRAGM. BELLOWS, VALVES. Outlet Pressure Load Range Spring Spring psig (bar) Color A Vacuum to 25 ( ) Red CHECK & RELIEF. VALVES. B 5 to 50 ( to ) White C 10 to 100 ( to ) Blue D 20 to 150 ( to ) Yellow METERING. NEEDLE &. VALVES. Flow Data The graphs illustrate the change or droop in outlet Pressure as the flow rate increases and the inlet Pressure decreases. 0 4 10 20 30 40 50 60 0. INSTRUMENT. Inline and in.