Transcription of 复旦大学微纳加工实验室 - Fudan University
1 2020-10-13 1 = 30 14 <10nm JBX-8100FS ( Auriga) (Sigma+Raith) (Suss MA6) (mPG501) ( Eitre 3) (Lab18) (Nano36) (DE500) (Oxford) (Picosun) Parylene HMDS (JY) (JY) (Filmetric) (Trion) ICP (Oxford) (Tepla) Plasmonics ( ) lift-off Nano-membrane Spintronics Nano methodology .. Nano electronics ( ).
2 Nano-membrane ( ) .. 683 40 2239 2018 12000 200 , 50% Nature/Science 30 2014 ppt 2 2 2 5 9 00-11 00 C413 / N405 4 5 N407 1000 130
3 5 I LAB18 II I ICP PECVD II I II SEM/EBL HMDS Parylene B062 50 C413 2 / / 17 00 8 00 2 - 3 2 90 TMAH SiH4 HBr BCl3, NH3 N2O SF6 CF4 CHF3 C4F8 , Ar MSDS 1.
4 2. 3. MSDS 4. Ps. - FTP 21 user/user MSDS FTP 21 public/public 1
