Fundamentals of Vacuum Technology Fundamentals ... - …

1 Fundamentals of Vacuum TechnologyEdition 2016 Leybold GmbH Bonner Strasse 498 D-50968 CologneT +49 (0) 221-347-0 F +49 (0) 221-347-1250 No. 199 90 Fundamentals of Vacuum TechnologyLV_13990_2016 13:331 PrefaceLeybold GmbH being part of the globally active industrial Atlas Copco Group has developed into the world market leader in the area of Vacuum Technology . In this leading position we do not only recognize this as a task and a challenge but also as a responsibility with respect to our customers. This brochure shall independently of the current range of products provide an easy to read overview covering the entire area of Vacuum Technology . The presented diagrams and data of the products shall above all promote a deeper understanding of the underlying technological functions and are not to be understood as a warranty of product properties.

2 The content has been enhanced through the addition of more physical principles and a number of other topics, since in the time after publication of the last edition there were naturally quite a few new developments which had to be taken into us, partnership-like customer relationships are a fundamental compo-nent of our corporate culture as are our continual investments in research and development serving as the foundation for new technological standards and innovations. In the course of our since 1850 corporate history we have in the area of Vacuum Technology accumulated a comprehensive process and application know-how. Jointly with our customers and partners we plan also in future to open up further markets, implement new ideas and develop pioneering , December 20162 Fundamentals of Vacuum TechnologyPrefaceFundamentals of Vacuum Technologyrevised and compiled by Dr.

3 Walter Umrath with contributions fromDr. Hermann Adam , Alfred Bolz, Hermann Boy, Heinz Dohmen, Karl Gogol, Dr. Wolfgang Jorisch, Walter M nning, Dr. Hans-J rgen Mundinger, Hans-Dieter Otten, Willi Scheer, Helmut Seiger, Dr. Wolfgang Schwarz, Klaus Stepputat, Dieter Urban, Heinz-Josef Wirtzfeld, Heinz-Joachim Zenker34 Table of Choice of pumping process .. Survey of the most usual pumping processes .. Pumping of gases (dry processes).. Pumping of gases and vapors (wet processes).. Drying processes .. Production of an oil-free (hydrocarbon-free) Ultrahigh Vacuum working Techniques .. Evacuation of a Vacuum chamber and determination of pump Evacuation of a Vacuum chamber (without additional sources of gas or vapor).

4 Evacuation of a chamber in the rough Vacuum Evacuation of a chamber in the high Vacuum Evacuation of a chamber in the medium Vacuum Determination of a suitable backing Determination of pump-down time from nomograms .. Evacuation of a chamber where gases and vapors are Selection of pumps for drying Flanges and their seals .. Choice of suitable valves .. Gas locks and seal-off fittings ..753. Vacuum measurement, monitoring, control and Fundamentals of low-pressure measurement .. Vacuum gauges with pressure reading that is independent of the type of gas .. Bourdon Vacuum Diaphragm Vacuum Capsule Vacuum gauges .. DIA VAC diaphragm Vacuum Precision diaphragm Vacuum gauges.

5 Capacitance diaphragm Liquid-filled (mercury) Vacuum gauges .. U-tube Vacuum gauges .. Compression Vacuum gauges (according to McLeod).. Vacuum gauges with gas-dependent pressure Spinning rotor gauge (SRG) (VIS CO VAC).. Thermal conductivity Vacuum gauges .. Ionization Vacuum gauges .. Cold-cathode ionization Vacuum gauges (Pen ning Vacuum gauges).. Hot-cathode ionization Vacuum Adjustment and calibration; DKD, PTB national standards .. Examples of fundamental pressure measurement methods (as standard methods for calibrating Vacuum gauges .. Pressure monitoring,control and regulation in Vacuum Fundamentals of pressure monitoring and Automatic protection, monitoring and control of Vacuum Pressure regulation and control in rough and medium Vacuum Pressure regulation in high and ultrahigh Vacuum Examples of applications with diaphragm Vacuum physics Quantities, their symbols, units of measure and definitions.)

6 Basic terms and concepts in Vacuum Technology .. Atmospheric air .. Gas laws and Continuum Kinetic gas The pressure ranges in Vacuum Technology and their characterization .. Types of flow and conductance .. Types of flow .. Calculating conductance Conductance for piping and openings .. Conductance values for other Vacuum Vacuum pumps: A survey .. Oscillation displacement Vacuum Diaphragm pumps .. Liquid sealed rotary displacement pumps .. Liquid ring Oil sealed rotary displacement Rotary vane pumps (TRIVAC A, TRIVAC B, TRIVAC E, SOGEVAC).. Rotary plunger pumps (E Pumps) .. Trochoid pumps .. The gas Dry compressing rotary displacement pumps.

7 Roots pumps .. Claw pumps .. Claw pumps with internal compression for the semiconductor industry ( DRYVAC Series ) .. Claw pump without internal compression for chemistry applications ( ALL ex ).. Accessories for oil-sealed rotary displacement pumps .. Condensers .. Fluid-entrainment pumps .. (Oil) Diffusion pumps .. Oil vapor ejector Pump Pump fluid backstreaming and its suppression (Vapor barriers, baffles) .. Water jet pumps and steam ejectors .. Turbomolecular Sorption pumps .. Adsorption pumps .. Sublimation Sputter-ion pumps .. Non evaporable getter pumps (NEG pumps).. Types of The cold head and its operating The refrigerator cryopump.

8 Bonding of gases to cold Pumping speed and position of the cryopanels .. Characteristic quantities of a of Contents4. Analysis of gas at low pressures using mass spectrometry .. A historical review .. The quadrupole mass spectrometer (TRANS PEC TOR) .. Design of the sensor .. The normal (open) ion source .. The quadrupole separation system .. The measurement system (de tec tor).. Gas admission and pressure adaptation .. Metering valve .. Pressure Closed ion source (CIS).. Aggressive gas monitor (AGM) .. Descriptive values in mass spectrometry (specifications) .. Line width (resolution) .. Mass Smallest detectable partial pressure.

9 Smallest detectable partial pressure ratio (concentration).. Linearity range .. Information on surfaces and amenability to Evaluating spectra .. Ionization and fundamental problems in gas analysis .. Partial pressure Qualitative gas analysis .. Quantitative gas Standard SQX software (DOS) for stand-alone operation (1 MS plus, 1 PC, RS 232).. Mul ti plex/DOS soft ware MQX (1 to 8 MS plus 1 PC, RS 485).. Process-oriented software Trans pec tor-Ware for Windows .. Development software Trans pec torView .. Partial pressure Leaks and their detection .. Types of leaks .. Leak rate, leak size, mass flow .. The standard helium leak rate.

10 Conversion Terms and Leak detection methods without a leak detector Pressure rise Pressure drop test .. Leak test using Vacuum gauges which are sensitive to the type of gas .. Bubble immersion test .. Foam-spray Vacuum box check Kryp ton 85 High-frequency Vacuum Testing with chemical reactions and dye Leak detectors and how they Halogen leak detectors (HLD 4000, D-Tek) .. Leak detectors with mass spectrometers (MS) .. The operating principle for a MSLD .. Detection limit, background, gas storage in oil (gas ballast), floating zero-point Calibrating leak detectors; test leaks .. Leak detectors with quadrupole mass spectrometer (ECO TEC II).