High-Flow, Springless Diaphragm Valves - Swagelok

1 PIPE, WELD, HOSE / NEEDLE & INSTRUMENT. TUBE STANDARD BALL & PLUG DF SERIES CHECK & RELIEF MODULAR REGULATORS MEASUREMENT MEDIUM- high - VCR, VCO FLEXIBLE metering MANIFOLD REFERENCES. FITTINGS TUBING Valves Diaphragm Valves SYSTEMD & FILTERS DEVICES PRESSURE. FITTINGS TUBING Valves SYSTEMS. 1. high -Flow, Springless Diaphragm Valves DF Series high -Flow, Spr ingle s s 1/4, 3/8, and 1/2 in.; 10 and 12 mm end connections Working pressures up to 300 psig ( bar). D iaphragm Valve s 316L VAR stainless steel body DF Se r ie s 2 Bellows- and Diaphragm -Sealed Valves Features FITTINGS. TUBE. Valve Pneumatic Actuators Flow coefficient of meets high - Normally closed and normally open flow requirements. models are available for remote actuation. PIPE, WELD, No springs or threads in wetted areas VCR, VCO.

2 FITTINGS. improves cleanliness. Actuators require low actuation Fully swept flow path enhances pressure. purging and gas replacement. Construction is lightweight aluminum. Minimal PCTFE volume minimizes STANDARD. Manual Actuators TUBING. gas adsorption and desorption. Fully contained seat insert increases Three-quarter turn actuation cycle life. Choice of seven handle colors high -flow Swagelok H Type VCR Round Handle FLEXIBLE. TUBING. HOSE /. fittings, Swagelok VCR fittings, and Window handle provides visual tube butt weld end connections are indication of open and closed available. positions. BALL & PLUG. Integral Lockout Handle Valves . Standard padlock or lockout device secures handle in closed position. Handle orientation provides visual indication of open or closed position.

3 Diaphragm . DF SERIES. Technical Data CHECK & RELIEF. Valves . Pneumatic Actuator Working Pressure Temperature Rating Flow Internal Actuation Air psig (bar) F ( C) Coefficient Orifice Volume Pressure Displacement Model Operating Burst Operating Bakeout (Cv) in. (mm) (cm3) psig (bar) (cm3). Vacuum to ( ). metering . NEEDLE &. Manual . Valves . 300 ( ) 10 to 150 302 (150) body with 3200 (220) ( ). Vacuum to ( 23 to 65) (valve open) HVCR 70 to 100. Pneumatic fittings ( ). 125 ( ) ( to ). See Polyimide Seat Material, page 4, for operating temperatures up to 270 F (132 C). INSTRUMENT. Contact your authorized Swagelok sales and service representative for more information. MANIFOLD. SYSTEMS. Process Specifications See Swagelok Ultrahigh-Purity Process Specification (SC-01) catalog, MS-06-61; Swagelok Photovoltaic Process Specification (SC 06) catalog, MS 06 64; and Swagelok Special Cleaning and Packaging (SC 11) catalog, MS-06 - 63, for details on MODULAR.

4 SYSTEMD. processes, process controls, and process ver i fi ca tion. Assembly and Process Process Wetted Surface Cleaning Packaging Designator Specification Roughness (Ra) Testing Ultrahigh-purity cleaning with Performed in ISO Class 4 Ultrahigh- REGULATORS. & FILTERS. a continuously monitored, work areas; Valves are double Purity Process P. deionized water, ultrasonic bagged and vacuum sealed Specification cleaning system in cleanroom bags. (SC-01). Inboard and internal helium Electropolished high -purity cleaning with Photovoltaic leak tested to a maximum Performed in specially and finished to an a continuously monitored, Process leak rate of 1 10 9. MEASUREMENT. cleaned areas; Valves are P6 average of 5 in. deionized water, ultrasonic Specification DEVICES. std cm3/s in accordance individually bagged.

5 ( m). cleaning system (SC-06) with SEMI F1. Special cleaning with Performed in specially Special Cleaning non ozone-depleting cleaned areas; Valves are P1 and Packaging chemicals individually bagged. (SC 11). MEDIUM- high - PRESSURE. Performance Specifications Refer to DF Series Diaphragm Valve Technical Report, MS 06 14, for additional information on particle counting, moisture analysis, hydrocarbon analysis, ionic REFERENCES. cleanliness, and lab cycle testing data. high -Flow, Springless Diaphragm Valves DF Series 3. Materials of Construction Flow Data at 70 F (20 C). FITTINGS. TUBE. in. ( mm) orifice, Cv Material Grade/ Material Grade/. Component ASTM Specification Component ASTM Specification Pressure Valve Round Handle Drop to Water Flow Air Flow 316L VAR SS/ SEMI Handle Polyester with SS insert Atmosphere gal/min std ft3/min PIPE, WELD, VCR, VCO.

6 FITTINGS. Body F20 high -Purity Actuator, bonnet nut 316 SS psi (bar) (L/min) (std L/min). Seat PCTFE/AMS 3650 Bonnet S17400 SS 10 ( ) ( ) (200). Cobalt-based superalloy Integral Lockout NUPRO DF SERIES BOTTOMH andle VIEW 50 ( ) (17). N-ELD-444 19 (530). Diaphragms (UNS R30003)/AMS 5876 Handle Glass-filled nylon 100 ( ) (23) 33 (930). STANDARD. TUBING. Pneumatic Actuator Set screws Alloy steel/F912. Cylinder, cap, pistons Aluminum Retaining ring PH 15-7 Mo SS. S MALE ROTATABLE VCR N-ELD-446. O-rings Buna N O-rings Fluorocarbon FKM. NUPRO DF SERIES BUTT WELD N-ELD-445. Springs S17700 SS Sleeve, base Powdered metal SS. FLEXIBLE. Wetted components listed in italics. TUBING. HOSE /. 20 % minimum elongation allowed. Ordering Information and Dimensions NUPRO DF SERIES FEMALE HVCR N-ELD-443.

7 Integral Lockout Dimensions, in inches (millimeters), are for reference only and are subject to change. Handle BALL & PLUG. Valves . ( ). Pneumatic Actuator Bottom max, ( ) ( ) min 1/8 NPT Round Handle shank ( ) inlet ( ) diameter Diaphragm . DF SERIES. ( ) ( ). Four mounting holes, M5 6H. thread, ( ) deep, 45 from CHECK & RELIEF. center line, on a ( ) bolt circle. M5 holes are Valves . ( ). compatible with 10-32 mounting (109). ( ) closed, screws. locked out metering . NEEDLE &. Valves . A A A. ( ) ( ). Rotatable Male H Type Tube Butt Welds Female VCR Fittings VCR Fittings INSTRUMENT. MANIFOLD. Valves with Round Handles or Pneumatic Actuators SYSTEMS. End Connections Basic A. Inlet/Outlet Size Ordering Number in. (mm). Select a basic ordering number, add a process designator (see page 2), then add a pneumatic actuator or handle Female H type 1/4 in.

8 6LV-DFHFR4- color designator. VCR fittings ( ). Examples: 6LV-DFHFR4-P-BK for P process, black handle MODULAR. SYSTEMD. Rotatable male H 1/4 in. 6LV-DFHMR4- type VCR fittings ( ) 6LV-DFHMR4-P1-C for P1 process, normally Female/rotatable male closed pneumatic actuator 1/4 in. 6LV-DFHFR4 HMR4- H type VCR fitting ( ). Female Pneumatic Handle Color Designator 1/2 in. 6LV-DFFR8- REGULATORS. VCR fittings Actuator Designator & FILTERS. (106) Black -BK. Rotatable male VCR Normally 1/2 in. 6LV-DFMR8- -C Blue -BL. fittings (106) closed Normally Green -GR. 3/8 6LV-DFBW6- -O. in. open Orange -OR. MEASUREMENT. Normally DEVICES. 1/2 6LV-DFBW8- Red -RD. in. closed with Tube butt welds -CM White -WH. ( ) indicator 10 6LV-DFBW10M- switch Yellow -YW. 1 mm 12 . MEDIUM- high - 6LV-DFBW12M- Valves with Integral Lockout Handles PRESSURE.

9 1 mm Insert L into a basic ordering number, add a process designator (see page 2), then add a handle color designator. Examples: 6LV-DFLHFR4-P-BK for P process, black handle REFERENCES. 6LV-DFLHMR4-P6-BL for P6 process, blue handle 4 Bellows- and Diaphragm -Sealed Valves Options and Accessories FITTINGS. TUBE. Polyimide Seat Material Panel Mounting DF series Valves with polyimide seats are rated for Is available for round-handle Valves . operating temperatures from 50 to 270 F (10 to 132 C). Includes threaded bonnet nut and PIPE, WELD, Pneumatic actuators contain fluorocarbon FKM O-rings. 1 1/8 in. hex panel mount nut. VCR, VCO. FITTINGS. All other materials and ratings remain the same. Requires in. ( mm). To order, insert V into the valve ordering number. diameter hole.

10 Example: 6LV-DFLVBW8-P-C To order, add -PM to the valve ordering number. STANDARD. Example: 6LV-DFHFR4-BK-PM. TUBING. Indicator Switch Transmits a signal to an electrical device Maintenance Kits indicating either the open or closed position of a pneumatically actuated Diaphragm Replacement Kits FLEXIBLE. TUBING. HOSE /. valve. Kits include two diaphragms and Features a single-pole, single-throw replace ment instructions. switch rated at: Ordering number: E-3DK-DF. 1/2 A for 115 V (ac) for normally Actuator Replacement Kits BALL & PLUG. open switch;. Valves . 1/4 A for 115 V (ac) for Kits include all components except body, seat, and a normally closed diaphragms. switch;. Actuator Kit Ordering Number Diaphragm . 40 to 185 F ( 40 to DF SERIES. Green round handle PY-DF-K1-GR.)