Introduction to the Semiconductor Module

1 COMSOL COMSOL Access COMSOL COMSOL CM024103 1998 2018 COMSOL 7,519,518 7,596,474 7,623,991 8,457,932 8,954,302 9,098,106 9,146,652 9,323,503 9,372,673 9,454,625 COMSOL ( ) COMSOL COMSOL COMSOL Multiphysics COMSOL Desktop COMSOL Server LiveLink COMSOL AB COMSOL AB COMSOL | 3.

2 5 .. 7 .. 12 .. 16 MOSFET .. 174 | | 5 COMSOL Multiphysics.

3 COMSOL Multiphysics Semiconductor Module User s Guide COMSOL Multiphysics COMSOL Multiphysics 6 | COMSOL Desktop | 7 1 p-n

4 (1/cm3)+5 0 -5 1: p-n MOSFET - - MESFET - JFET MOSFET MOSFET MOSFET 2 (cm-3)Vg=4 V, Vd=1 V8 | 2: MOSFET (Vg) (Vd) 4V 1V cm-3 MOSFET ISFET WKB MOSCAP PIN PIN MESFET EEPROM LED 3 | 9 3.

5 A/cm2 / 10 | | 11 - 12 | COMSOL Multiphysics 4 MOSFET | 13 4: 1 14 | 5 5.

6 () AC/DC () AC/DC / SPICE () | 15 () () ()

7 - - () - 16 | COMSOL Multiphysics TABLE 0-1: cir 1es semi 2 - - 2 - - schr - - 1 COMSOL 2 AC/DC | 17 MOSFET MOS - - MOSFET 40 22 MOSFET

8 N p p n p n n n-p/p-n 6 MOSFET 7 MOSFET 6: MOSFET 18 | 7: 50nm MOSFET TEM KTH Hellstr m Prof. M. stling ERC OSIRIS 8: 8 6 (50 mV) 0 5 V 2 3 4 V 0 5 V vs.

9 | 19 Windows Linux Mac 1 COMSOL COMSOL COMSOL 2 3 (semi) 4 5 6 1 1 Linux Mac 2 Vd10[mV] Vg2[V] 20 | 1 COMSOL 1 1 1 2 m 1 1 1 2 3 1 1 1 2 3 - x 0 0 3 3 - y 11 2 4 4 | 213