IPUP A100 Instruction manual - PTB Sales

1 ALCATEL VACUUMTECHNOLOGY FRANCE98 , avenuedeBrogny--- BP 206974009 ANNECYC edex --- FranceTEL. (33 ) 4 50 65 77 77 FAX: (33 ) 4 50 65 77 89 IPUPA100 Instructi on manualEdi tion:10 Date:09/00 manual P/ N107782 View our inventoryAlcatel VacuumTechnology France --- IPUP a100 Instruction manual1 / 2 IPUP a100 Dear Customer,You havejust purchasedanAlcatel drypump. We thank you and are proud to includeyou as one of our product has benefitedfromAlcatel smany years of experience in semiconductorprocess es and dry optimumperformance and to obtainfull satisfaction fromthis equipment, werecommendthat you study this manualbefore any intervention on your pump, inparticular, the chapter on install ation andstart P/PI version: for corr osive, reactive, flammable, pyrophoric,oxidizing process L/LI version: for clean Reduced volume and Low operating High performance (pumping spee d and ultimate press ure).

2 L Advanced monitoring / 2 Alcatel VacuumTechnology France --- IPUP a100 Instruction manualIPUP a100 Specia l featuresl Multi-- -stage Roots Water-- -cooled --- stagepump with rootstechnologyl Established noise and vibrationGenuine dry pumpl Total tightness with the footprintl Reduced size 23 .84 inches x 11 .02 inches x 11 .81 inches.( mmx 280mmx 300mm).Reduced cost of ownershi pl Design for Reduced power Reduced water Reduced control interf acel Amat SPI Amat device net RS 232/485 (N2connection) (cont d) (withmonitoringsystem) !WARNING!CAUTIONC ontentsAlcatelVacuumTechnologyFrance---I PUPA100 Instructionmanual3 101 / 3 Alcatel VacuumTechnology France --- IPUP a100 Instruction manualIPUP A100operating principleDESIGN TO MINIMIZEPOTENTIEL RESIDUESThe equipment was designed to minimize potentiel residue deposits.

3 L by limiting the internal volumes that contain gas,l by injecting N2purge on each pump stage to dilute the processgas (P version only),l b y regulating the pump temperature and adjusting it to eachprocessin order to limit gas condensation (P version only),l b y integrating the silencer inside the pump to reduce by-- --- STAGE PUMP WITHROOTS TECHNOLOGYIPUP A100pump consists of 5 Roots type two rotors rotate without t ouching each 5 High press ure stage(e xhaust stage)Stage 4 Transfer stageStage 3 Transfer stageStage 2 Transfer stageStage 1 Low press ure stage(inlet stage)GB00515A102 (CONT D)Tightnessatmotorside(shaftpassage)Thev acuumtightnessisensuredbythemotordesignw ithbuilt---injacket(hermeticallysealed).

4 201 / 3 Alcatel VacuumTechnology France --- IPUP a100 Instruction manualIPUP A100descriptionIPUPA100 DESCRIP TIONThe IPUP A100pump includes an intell igent monitoring pump is full y integrated in a compact and enclosed frame whichincludes:l the control panel located on the front panel,l the facilities panel located on the rear panel,An Amat SPI connector located on the rear facilities panel all ows pumpcontrol and communication with the hand held display module can be connected to the front panel todisplay and programthe pump facilities panelFront panelAmat SPI interface connectorINLETHand held display modulePress ure regulatorN2 INWater INWater OUTMain powerManometerGB00516A 202 / 3 Alcatel VacuumTechnology France --- IPUP a100 Instruction manualIPUP A100descriptionINTERNAL EQUIPMENT OF THEIPUPA100 PUMPSIPUPA100P/PIequipmentThe IPUP A100P/PI is designed for corr osive process es.

5 So it isequipped with:l nitrogen injection and water cooling circuit optimized to avoiddeposition and condensation,l temperature regulation IPUP A100PI pump is equipped with an additional intermediate portfor specific applications where a permanent pumping flow of about35m3/h is required (example:dynamic seal pumping).PIPUP A100P/PI EQUIPMENTPump Low press ure stage Transfer stages High press ure stageINLETEXHAUSTTcM213456997 MonitoringPumpMotorFrequency converterAnti suckback valveInert gasWater INSILENCERS upply blockGas circuit Gas solenoid valve Press ure regulator Inert gas purge nozz lesCooling circuit Water solenoid valveSensorsTcTemperature sensorP Press ure sensorM Motor sensorWater OUT88 Intermediate port for IP UP a100 PIve rsion onlyTc888GB00516A 203 / 3 Alcatel VacuumTechnology France --- IPUP a100 Instruction manualIPUP A100descriptionIPUPA100L/LI equipmentThe IPUP A100L/LI is designed for clean applications such as load lockpumping.

6 Cryopump regeneration and backing of turbopumps onnon --- corr osive process only a water cooling circuit is install ed,l no nitrogen purge is nee IPUP A100LI pump is equipped with an additional intermediate portfor specific applications where a permanent pumping flow of about35m3/h mbar is required (example:dynamic seal pumping).IPUP A100L/LI EQUIPMENTPump Low press ure stage Transfer stage High press ure stageEXHAUSTM21345 MonitoringMotorFrequency converterAnti suckback valveWater INCooling circuit nozz leTcTemperature sensorM Motor sensorWater OUTPumpIntermediate port for IP UP A100LI ve rsion onlyINLETSILENCER6 TcGB00516A301 , (seeC10)(ifconfigured).

7 Electrical/electroniccabinetHandhelddisp laymoduleONWARNINGHAZARDKEYBOARDH andhelddisplaymoduleconnectionredLEDyell owLEDgreenLEDF rontpanelsilkscreenprintingGB00517A 30 Alcatel VacuumTechnology France --- IPUP a100 Instruction manual2 / 2 IPUP A100monitoring systemMONITORING SYSTEMCHARACTERIS TICSl Microprocess or controll Parameters and mess ages are displayed on the hand-held Memorization of the last ten warnings and RS 232 -- - RS 485 -- - Network :the monitoring systemcan be interfaced with the processtoolvia the Amat SPI connector or the RS 232/ / electronic cabinetSensorsActuators(valves)Indicator lightsHand helddisplay moduleAmat SPI connectorMainsConverterRS 232/ 485connectorMAIN FUNCTIONSl Motor Pump temperature monitoring and Exhaust press ure monitoring (P version only).

8 L Maintenance time 40 Alcatel VacuumTechnology France --- IPUP a100 Instruction manual1 / 9 IPUP A100technical characteristicsCharacteristicsUNITSA100L (1)A100LI(1)A100P(1)A100PI(1)v Rotation spee dHzrpm1006000100600010060001006000v Peak Pumping spee dm3/hl/mincfm951583639515836395159363951 59363v Ultimate press ure (without N2purge)v Ultimate press ure (with 30 slmN2purge) 250v Max. continuous inlet press ureTorr50505050v Supply voltage 3 PHV200-- 208V-- 3 phase -- 50/60Hz(3)v Maximum continuous power(at max. press ure) Power consumption at ultimatepress Average sound level at fullspee ddbA55505550speedv Guaranted sound level at fullspee ddbA58---58---v N 2 Flowrate Ambient temperature C15to 5015to 50v Water flowl/hmin.

9 100v Water temperature Cmin. 10 /max. 25v Gear box fluid capacity (2)cm3cc150v Weight (without hand helddisplay module) / 100v Inlet flangeDN 50 iso KFv Exhaust flangeDN 25iso KFv Secondary exhaust portDN 25iso KFv Interstage flangeDN 25iso KFv Max exhaust flowcfm13---13---Vibrationlevel at the enclosurebaseplate sidehole (4 to 400 HzSpectrum)v Acc elerationv Displacementv Spee dG mmm/s< < <1(1)Variable spee d control, min. 20Hz / max. 100Hz.(2)Oil charge is fill ed at factory. Do not modify the oil l evel.(3)Acc ording to CE regulations, IPUP A100can withstand a supply voltage variation of 10 %.GB00518A402/9 AlcatelVacuumTechnologyFrance---IPUPA100 InstructionmanualIPUPA100technicalcharac teristicsIPUPA100 DIMENSIONSANDINTERFACING(1/2)FrontviewBo ttomviewRightviewLeftviewHandhelddisplay moduleconnectorSeedetailSGB00518A40 AlcatelVacuumTechnologyFrance---IPUPA100 Instructionmanual3/9 IPUPA100technicalcharacteristicsIPUPA100 DIMENSIONSANDINTERFACING(2/2)FrontviewRi ghtviewipupA100GB00518A404/9 AlcatelVacuumTechnologyFrance---IPUPA100 InstructionmanualIPUPA100technicalcharac teristicsIPUPA100 STACKINGDIMENSIONSANDINTERFACING(1/2)

10 LeftviewFrontviewRightviewGB00518A40 AlcatelVacuumTechnologyFrance---IPUPA100 Instructionmanual5/9 IPUPA100technicalcharacteristicsIPUPA100 STACKINGDIMENSIONSANDINTERFACING(2/2)Rig htviewFrontviewA100 STACKINGCG&WEIGHTDISTRIBUTION ipupA100GB00518A406/9 AlcatelVacuumTechnologyFrance---IPUPA100 InstructionmanualIPUPA100technicalcharac teristicsIPUPA100 PDIMENSIONSF rontviewLeftviewRightviewGB00518A40 AlcatelVacuumTechnologyFrance---IPUPA100 Instructionmanual7/9 IPUPA100technicalcharacteristicsIPUPA100 PIDIMENSIONSF rontviewLeftviewRightviewGB00518A408/9 AlcatelVacuumTechnologyFrance---IPUPA100 InstructionmanualIPUPA100technicalcharac teristicsIPUPA100 LDIMENSIONSF rontviewLeftviewRightviewGB00518A40 AlcatelVacuumTechnologyFrance---IPUPA100 Instructionmanual9/9 IPUPA100technicalcharacteristicsIPUPA100 LIDIMENSIONSF rontviewLeftviewRightviewGB00518A50