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1 18 2 21 .. 1 . ---------------------------------------- -------------------------------------- 3. ---------------------------------------- -------------------------- 4. 2 (ZnO). ---------------------------------------- -------------------------------- 5. ZnO ---------------------------------------- --------------------- 5. ZnO ---------------------------------------- --------------------- 6. ---------------------------------------- ------------------ 6. ---------------------------------------- ------------------ 11. ---------------------------------------- --------- 12.. SnO 2 ---------------------------------------- ----------------- 13. ITO ---------------------------------------- -------------------- 13. ZnO ---------------------------------------- ------------------- 14. ZnO ---------------------------------------- --------------- 15. ZnO ---------------------------------------- ------------------ 17.

2 3 ZnO . ---------------------------------------- -------------------------------- 18. Hall ---------------------------------------- ------------------ 18. Hall ---------------------------------------- -------- 18. van der Pauw ---------------------------------------- ------ 20. van der Pauw ------------------------------------- 21. ---------------------------------------- ----------------------------- 23. ---------------------------------------- ------ 23. ---------------------------------------- -------------------------------- 23. ---------------------------------------- --------- 24. -1- 4 ZnO . ---------------------------------------- ------------------------------- 25. ---------------------------------------- ------------------- 25. ---------------------------------------- ----------- 27. Hall ---------------------------------------- ---- 28. ---------------------------------------- -- 29.

3 ---------------------------------------- ------------------- 30. ---------------------------------------- -------------------- 30. --------------------------------------- 31. 5 . ---------------------------------------- ---------------------------------- 32. ---------------------------------------- ------------------------------------- 33. ---------------------------------------- ---------------------------- 33. ---------------------------------------- ---------------------------------------- ---------- 34. ---------------------------------------- ---------------------------------------- ---------------- 36. -2- 1 .. EL .. ( . ) .. (Sn) In 2 O 3 (Indium Tin Oxide : ITO) .. -3- .. Pt , Au , Ag , Cu , Ni Au / Bi2 O3 / Sub . , Au / Cr / Sub . TiO2 / Ag / TiO2 , Bi 2 O3 / Au / Bi2 O3. ZnS / Ag / ZnS , SnO2 / Ag / SnO2. SnO2 , In2 O3 , CdO , ZnO , Cd 2 SnO4. ( ) SnO2 : Sb , SnO2 : F. In2 O3 : Sn , In2 O3 : W , In2 O3 : Mo ZnO : Al ( Cu 2 S , CdS , ZnS ).

4 LaB6 , TiN , TiC , ZrN , ZrB2 , HfN. TiO2 / TiN , ZrO2 / TiN. ITO nm 90 % 2 10 4 cm .. ITO ( H + ) . (In) .. 2005 2 (Zn) ~ $ / kg In . 960 ~ 1030 $ / kg 2003 10 . (Flat Panel Display : FPD . ITO .. In ITO . Zn . Hall . Hall .. Hall .. -4- 2 (ZnO).. ZnO . ZnO ( ) ZnO . ( ) ( ) ( ) ZnO . ( ) . ZnO . ZnO , Zn . (O) ZnO . ZnO . ZnO ZnO . ZnO ( ) . Zn O . O 3 / 8 . 4 . 1 . (C) (Si) (GaAs) .. -5- ZnO . Zn O . ZnO 4 Zn 2+. 4 O 2 . Zn O . X .. ( ) . ZnO 6 . ZnO 6 4 . Zn 2+ O 2 . ( ) O 2 . ( ) . O Zn . ZnO 4 . ZnO .. ( ) .. v E .. v = E (2-1). e . = ( : , m * : ) . m*.. 1 q .. 1. = (2-2). qn . n . n . -6- ZnO . eV . Zn O . Zn n . Zn O .. ZnO . 166 : p137 . rf (radio frequency . 10 4 cm ZnO . ZnO . [Zn i ' ] [ Vo' ].. Al . [Al' ] [Zn i ' ] [ Vo' ] . -7- Al . 8 10 20 cm 3 Al Zn .. m * . m * n ZnO m* = 5 .. BHD . (Brooks-Herring-Dingle theory) . I Fermi - Dirac .. 24 3 ( 0 r ) 2 h 3 n g I = (2-3).))

5 E 3 m *2 ( x) Z 2 n I. 0 r Z n I . g ( x ) .. g 4 1. ( x) = In 1 + (2-4). x . 1+. x 4. x . e2m *. x= (2-5). 0 r h 2 3 5 n . 1 / 3 .. N . -8- . m * e3. N = (2-6). 20 0 r h 3 n N. N .. eh 4 u1 23 . 2. ac = 2. (2-7). 3E1 m *5 ( kT ) 3. u1 E1 k .. n . disl .. 30 2 d 2 2 ( kT ) 3. disl = ( ). N disl e 3 f 2 d m kT. d = ( ). e2n d f . N disl d .. Qt = Nl 2 (2-10). Qt N l 2 . Qt < NL ( L ) n N . E B . -9- 2. q 2 Qt EB = (2-11). 8 N.. E Lq 2. g th =. exp - B (2-12). 2 m * kT kT . E B l 2 . g tun . Lq 2 2m * E B 4 l 2 2m * E B . g tun = exp (2-13). h 2l2 n h .. g tun .. 1 1 1. = + +L+ (2-14). 1 2 n .. ZnO .. ( n > 5 1018 cm -3 ) .. - 10 - . ZnO 320 ~ 390 nm . UVA ( 9 ) .. (nm) Eg = 1240 / ( : ev) .. Eg (eV) (nm). Eg . Al 2 O3 149. SnO2 326. NiO 344. TiO2 387. ZnO 375. TiO2 413. Fe2 O3 563. CdO 590.. ZnO . 380 nm ( . ) 380 nm . (TiO 2 ) ZnO . ZnO .. ( ) Burstein - Moss . - 11 - Burnstain-Moss.

6 Burstein-Moss .. ZnO . ZnO . ZnO. (K) 2248 ( ). 3. (Kg m ) 10 3. ( ) 4~5. ~ ( ). (g / 100g H 2 O) 3 ~ 5 10 4 (298K). (J / mol) (J K 1 mol 1 ) (298K). (J / m deg s) 10 4 (370K). (298K ). : P6 3 mc - 12 - . ( 380 ~ 780 nm 80 %. ) ( 1 10 3 cm ) .. In 2 O 3 (Sn In 2 O 3 .. ITO ) SnO 2 . (F Sb SnO 2 ) . ZnO (AL Ga ZnO . ) ( ) ~ ( ) SnO 2 . ITO ZnO . SnO 2 . SnO 2 .. 10 3. Torr . 250 90 % . SnO 2 90 % .. SnO 2 3 ~ 5 10 3 Torr . 420 ITO . ITO 1 10 3 cm . (As) . (Sb) (F) SnO 2 : Sb SnO 2 : As SnO 2 : F . F 3 10 4 cm . - 13 - ITO . ITO In 2 O 3 - SnO 2 . SnO 2 . 10 wt. % ~ 400 2 10 4 cm . FPD .. ITO ITO 200 . 10 5 cm . ITO . ZnO . ZnO . ZnO eV . Zn . 80 % 10 4 cm . ZnO ZnO (ZnO ) . (CVD) .. 200 Ga 3 % 2 10 4 cm . 8 10 20 cm 3 Hall 29 cm 2 / vs 90 %.. - 14 - ZnO . ZnO O 2 . (Reactive Plasma Deposition : RPD) RPD . ( ) .. 52 (2005) . RPD .. 170nm / min . 5 ~ 6 .. (ZnO Ga 2 O 3 (Ga 3 wt. % )).

7 (LaB 6 ) . ( ) . - 15 - . (250 A).. CVD . 400 (PLD) 300 250 . rf (rfMS) . RPD . CVD .. ZnO rfMS .. RPD 200 rfMS . rfMS .. - 16 - ZnO . ZnO 2002 . ( ) 60 % . 2001 2004 ZnO .. ZnO . 2001 2002 2003 2004 . (t) (t) (t) (t) . 43193 46512 46248 47311 5844 1892 1986 2077 2300 1608 1921 1936 1308 1110 1030 911 930 652 643 702 775 557 587 654 682 377 368 390 394 324 216 199 218 252 21488 22302 22236 17324 84 71093 75548 75372 77533 [ : ]. - 17 - 3 ZnO .. ZnO . Hall Hall . (HL5500PC : ACCENT (U-4100 : HITACHI) . (Alpha-Step : KLA Tencor) . Hall . Hall .. Hall .. 1879 E. H. Hall Hall (Hall effect) . - 18 - n Hall . n Hall ( ) I x . n B z . v x . qv x B z y G . H . H G y . (Hall ) E y Hall + y qE y .. (Lorentz's force) 0 . qE y ( qv x B z ) = 0 (3-1). I x b t p . I x = qnv x bt (3-2). G H Hall V H . (3-1 , 3-2) . I x Bz VH = E y b = RH (3-3). t R H . 1. RH = (3-4). ( q n). n Hall (Hall coefficient).)

8 - 19 - Hall V H Hall R H I x [A] . B z [T] b [m] t [m] q [C] p [m-3] V H [V] R H [m3/C].. p Hall . 1. RH = (3-5). (q p). (3-4) Hall . n . (3-4) (3-5) . n p Hall . Hall (3-6) . R H n p . 1 p p n n 2 2. RH = (3-6). q (n n + p p )2.. (3-4) ~ (3-6) Hall R H .. (Si) (Ge) .. = 3 / 8 . = 315 / 512 . n n . n = q n n (3-7). (3-7) (3-4) .. RH n = (q n n ) = n = H n (3-8). qn . H n Hall (Hall mobility) p . Hall H p . - 20 - . RH p = (q p p ) = p = H p (3-9). qn .. van der Pauw . van der Pauw . Hall n . p . van der Pauw Hall Hall .. van der Pauw Hall .. (a) (b) . 1 cm . 4 . (b) .. (a) , (b) , A, B, C, D . van der Pauw . - 21 - .. Hall .. van der Pauw .. AB I AB CD VCD . R AB ,CD . VCD. R AB ,CD = (3-10). I AB. BC I BC DA V DA . R BC , DA . V DA. R BC , DA = (3-11). I BC. AC I AC B . BD V BD . V BD. R AC , BD = (3-12). I AC. n .. d (R + RBC , DA ) R AB ,CD . = f . AB ,CD. (3-13). In 2 2 R . BC , DA.

9 B. n= (3-14). e d R AC , BD. d R AC . BD. = (3-15). B . e d f . R AB ,CD. - 22 - R BC , DA . R AB ,CD RBC , DA f exp(In2/f ) . = arccosh (3-16). R AB ,CD + RBC , DA In 2 2 . R AB ,CD > RBC , DA. f (3-16) . R AB ,CD / RBC , DA (= R ) .. - 23 - . ( ) .. X . (Atomic Force Microscope : AFM) (Scanning Electron Microscope : SEM) .. - 24 - . [nm]. 5. 5. (AFM , STM ) 500. (SEM) 5. (TEM) 5. (AES) 1. (SIMS) 3. (RBS) 10.. 1 ~ 50 mg .. - 25 - 4 ZnO .. ZnO .. ZnO 3 . Hall Hall . Hall (HL5500PC : ACCENT) . Ga 4 % 8 sccm 1 cm ZnO.. Hall .. 30 ~ 150 nm 10 nm 150 ~ 400 nm 50 nm 400 ~ 600. nm 100 nm 20 . Hall .. - 26 - ZnO Hall . Hall . [nm] [ cm] [cm 2 / vs] [cm 3 ]. +20. 41 +20. 50 +20. 59 +20. 70 +20. 83 +20. 92 +21. 98 +21. 113 +21. 121 +21. 127 +21. 143 +21. 147 +21. 200 +21. 247 +21. 295 +21. 352 +21. 388 +21. 480 +21. 560 +21. 560 nm 10 4 cm . Hall cm 2 / vs 98 ~ 560 nm . 1 10 21 cm 3 . - 27.

10 ~ 100 nm 100 nm ~ 560 nm . 560 nm . 10 4 cm ITO .. 200 nm .. Resistivity (ohm cm). 0 100 200 300 400 500 600. Film thickness (nm).. - 28 - Hall . Hall . Hall cm 2 / vs ~ cm 2 / vs ZnO .. 40. Mobility (cm2/Vs). 30. 20. 10. 0 100 200 300 400 500 600. Film thickness (nm). Hall . - 29 - .. nm ~ 100 nm . 100 nm ~ 560 nm . 1 10 21 cm 3 100 nm .. +22. Carrier content (cm-3). +21. +20. 0 100 200 300 400 500 600. Film thickness (nm).. - 30 - . ZnO . (U-4100 : HITACHI) . 20 ZnO .. Ga 4 % 8 sccm 200 . ZnO 85 % .. ZnO 380 nm . 380 nm .. 10 20 ~ 10 21 cm 3 . 100. nm 41 nm 90. 50 nm 59 nm 80. 70 nm 83 nm 70 92 nm 98 nm 60 113 nm (%). 121 nm 50 127 nm 143 nm 40 147 nm 200 nm 30 247 nm 295 nm 20 352 nm 388 nm 10 480 nm 560 nm 0. 0 500 1000 1500 2000 2500 3000. (nm). (1). - 31 - . 5 nm . 100 nm 352 nm 560 nm .. nm ~ 147 nm 2300 nm ~. 1100 nm . 147 nm ~ 560 nm .. 100. 90 nm 80. 70 147 nm 60. (%).